Documents 1 Resist Heating Dependence on Subfield Scheduling in 50kV Electron-beam Maskmaking S. Babin *, A.B....

Slide 1 1 Resist Heating Dependence on Subfield Scheduling in 50kV Electron-beam Maskmaking S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts., University…

Documents 1 Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication S. Babin *,....

Slide 1 1 Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts., University…

Documents Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication

Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication S. Babin*, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts., University of California,…