Documents E beam litho

1 Electron beam lithography (EBL) 1. Overview and resolution limit. 2. Electron source (thermionic and field emission). 3. Electron optics (electrostatic and magnetic lens).…

Documents Electron beam lithography (EBL) 1.Overview and resolution limit. 2.Electron source (thermionic and.....

Slide 1 Electron beam lithography (EBL) 1.Overview and resolution limit. 2.Electron source (thermionic and field emission). 3.Electron optics (electrostatic and magnetic…

Documents Electron beam lithography (EBL)

Slide 1 Electron beam lithography (EBL) Overview and resolution limit. Electron source (thermionic and field emission). Electron optics (electrostatic and magnetic lens).…

Documents Electron beam lithography (EBL)

Slide 1 Electron beam lithography (EBL) Overview and resolution limit. Electron source (thermionic and field emission). Electron optics (electrostatic and magnetic lens).…