Surface Profiling Sensor Testing Motion and Automation for Test, Measurement and Inspection Semiconductor Inspection and Metrology Integrated Automation and Data Acquisition…
Zhao Hongzhe e-mail: [email protected] Bi Shusheng e-mail: [email protected] Yu Jingjun e-mail: [email protected] Robotics Institute, Beihang University, Beijing 100191,…
A novel flexure-based microgripper with double amplification mechanisms for micro/nano manipulation Xiantao Sun, Weihai Chen, Yanling Tian, Sergej Fatikow, Rui Zhou, Jianbin…