Documents Lect2 up040 (100324)

1. Lecture 040 – UDSM and BiCMOS Technologies (3/24/10) Page 040-1LECTURE 040 - ULTRA-DEEP SUBMICRON AND BiCMOSTECHNOLOGIESLECTURE ORGANIZATIONOutline•…

Documents 1 Sachs et. al. IEEE Trans. Nuclear Science NS-31, 1249 (1984) Threshold Shift vs Gate Oxide...

Slide 1 1 Sachs et. al. IEEE Trans. Nuclear Science NS-31, 1249 (1984) Threshold Shift vs Gate Oxide Thickness Hole removal process by tunneling in thin-oxide MOS Structures…