Documents © IMEC 2010 / CONFIDENTIAL Optimizing high frequency ultrasound cleaning in the semiconductor...

Slide 1 Optimizing high frequency ultrasound cleaning in the semiconductor industrySteven Brems IMEC 2010 / CONFIDENTIAL OutlineIntroduction to particle removalImproving…

Documents Optimizing high frequency ultrasound cleaning in the semiconductor industry

Slide 1 Optimizing high frequency ultrasound cleaning in the semiconductor industry Steven Brems © IMEC 2010 / CONFIDENTIAL Outline Introduction to particle removal Improving…