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Documents High Performance ALD HfO 2 -Al 2 O 3 Laminate MIM

Hang Hu1, Shi-Jin Ding1, HF Lim1, Chunxiang Zhu1, M.F. Li1, 2, S.J.Kim1, XF Yu1, JH Chen1, YF Yong1, Byung Jin Cho1, D.S.H. Chan1, Subhash C Rustagi2, MB Yu2, CH Tung2, Anyan…