Documents 1 Uranium Oxide as a Highly Reflective Coating from 2.7 to 11.6 Nanometers William R. Evans, Richard...

Slide 1 1 Uranium Oxide as a Highly Reflective Coating from 2.7 to 11.6 Nanometers William R. Evans, Richard L. Sandberg, David D. Allred*, Jed E. Johnson, R. Steven Turley…

Documents Uranium Oxide as a Highly Reflective Coating from 2.7 to 11.6 Nanometers Richard L. Sandberg Thanks....

Slide 1 Uranium Oxide as a Highly Reflective Coating from 2.7 to 11.6 Nanometers Richard L. Sandberg Thanks to Advisors: David D. Allred, R. Steven Turley Fellow EUV Members:…