1.Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 149 1.9.2005 12:05pmMicroelectromechanical8 Systems for SpacecraftCommunicationsBradley…
Slide 1 Microsystems Technology Office William C. Tang, Ph. D. MEMS Program Manager Microsystems Technology Office Defense Advanced Research Projects Agency (703) 696-2254…