Documents MEMS Fabrication S.APPA RAO. Overview What are MEMS? MEMS: Micro-Electro-Mechanical Systems =>...

Slide 1 MEMS Fabrication S.APPA RAO Slide 2 Overview What are MEMS? MEMS: Micro-Electro-Mechanical Systems => ‘smalltech’ MEMS Applications MEMS fabrication process…