Documents EE C245 – ME C218 Fall 2003 Lecture 1 EE C245 - ME C218 Introduction to MEMS Design Fall 2003...

Slide 1 EE C245 – ME C218 Fall 2003 Lecture 1 EE C245 - ME C218 Introduction to MEMS Design Fall 2003 Roger Howe and Thara Srinivasan Lecture 1 Slide 2 EE C245 – ME C218…