Documents MNC 2001, Japan 2001. 11.1KIGAM Ion Beam Laboratory Ion Beam Lithography Using Membrane Masks Ion...

Slide 1 MNC 2001, Japan 2001. 11.1KIGAM Ion Beam Laboratory Ion Beam Lithography Using Membrane Masks Ion Beam Lithography Using Membrane Masks Y.S. Kim*, W. Hong, H.J.Woo,…