Documents Toward Performance-Driven Reduction of the Cost of RET-Based Lithography Control Dennis Sylvester...

Slide 1 Toward Performance-Driven Reduction of the Cost of RET-Based Lithography Control Dennis Sylvester ([email protected]), Jie Yang (Univ. of Michigan, Ann Arbor)…

Documents A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools.

Slide 1 A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools Slide 2 Outline Introduction –Trends in mask cost –Design for value –The…