Slide 1 1 Ion Implantation M.H.Nemati Sabanci University Slide 2 2 Ion Implantation Introduction Safety Hardware Processes Summary Slide 3 3 Introduction Dope semiconductor…
* Ion Implantation M.H.Nemati Sabanci University * Ion Implantation Introduction Safety Hardware Processes Summary * Introduction Dope semiconductor Two way to dope Diffusion…