Documents 3 MEMS FABRICATION

* 3 MEMS FABRICATION Ken Gilleo PhD ET-Trends LLC 24% * MEMS Material Classes Silicon Aluminum Si3N4 (Nitride) GaAs SiC Polymers SiO2 Copper Aluminum Polymers SiGe Silicon…

Documents 1 3 MEMS FABRICATION Ken Gilleo PhD ET-Trends LLC 24%

* 3 MEMS FABRICATION Ken Gilleo PhD ET-Trends LLC 24% * MEMS Material Classes Silicon Aluminum Si3N4 (Nitride) GaAs SiC Polymers SiO2 Copper Aluminum Polymers SiGe Silicon…