Selected examples 1. Anomalous skin depth in ICPs J.D. Evans and F.F. Chen, Phys. Rev. Lett. 86, 5502 (2001). 2. Anomalous transport in helicon discharges M. Light, F.F.…

2007. 5. 2 Low-Pressure Capacitive RF Discharges Hyun-Chul Kim* * [email protected] Plasma Processing (EECE654) Substitute Lecture Many slides in this lecture are based…

Selected examples 1. Anomalous skin depth in ICPs J.D. Evans and F.F. Chen, Phys. Rev. Lett. 86, 5502 (2001). 2. Anomalous transport in helicon discharges M. Light, F.F.…

What’s special about helicon discharges? Helicon waves are whistler waves confined to a cylinder. Helicon discharges are made by exciting these waves. The boundary has…

A new theory of gas discharges based on experiments Francis F. Chen, University of California KAIST, Daejeon, S. Korea, April 2011 ICPs show anomalous skin depth UCLA Plasma…

What’s special about helicon discharges? Helicon waves are whistler waves confined to a cylinder. Helicon discharges are made by exciting these waves. The boundary has…