Slide 1Hierarchical Dummy Fill for Process Uniformity Supported by Cadence Design Systems, Inc. NSF, and the Packard Foundation Y. Chen, A. B. Kahng, G. Robins, A. Zelikovsky…
Monte-Carlo Methods for Chemical-Mechanical Planarization on Multiple-Layer and Dual-Material Models Supported by Cadence Design Systems, Inc., NSF, the Packard Foundation,…
Hierarchical Dummy Fill for Process Uniformity Supported by Cadence Design Systems, Inc. NSF, and the Packard Foundation Y. Chen, A. B. Kahng, G. Robins, A. Zelikovsky (UCLA,…