Documents © Fraunhofer IPMS T. Zarbock I 05.04.2013 I slide 1 MEMS CLEAN ROOM 1500 m 2, class 10 150 mm...

Slide 1 © Fraunhofer IPMS T. Zarbock I 05.04.2013 I slide 1 MEMS CLEAN ROOM 1500 m 2, class 10 150 mm (6”) Wafer line 3 shift preparation for R&D and pilot fabrication…

Documents Fraunhofer IPMS-CNT 2013 - Research in Nanoelectronics

11 F R A U N H O F E R I N S T I T U T E F O R P H O T O N I C M I C R O S Y S T E M S C E N T E R N A N O E L E C T R O N I C T E C H N O L O G I E S ANNUAL REPORT 2012/2013…