Slide 1 NanoFab&BioMEMS @ UCF Thru the Eyes of a Bug: MEMS for Beginners I am not a bug. I am an ant! Slide 2 NanoFab&BioMEMS @ UCF MEMS?MEMS? I guess you might never…
Slide 1 CMOS Fabrication Details CMOS transistors are fabricated on silicon wafer Lithography process similar to printing press On each step, different materials are deposited…
I guess you might never heard of MEMS.. MEMS stands for Micro Electro Mechanical Systems and we have a plenty of them in our daily lives… Me? Super Ant From www.lanl.gov/quarterly/q_sum03/airbags.shtml…
Chapter 4 CMOS Process Technology Boonchuay Supmonchai Integrated Design Application Research (IDAR) Laboratory July 5th, 2004; Revised - June 26th, 2006 CMOS Process Technology…