Documents 00/00/2008 1 Tunnel dielectric Trapping layer Blocking layer Gate material SiO 2 (nitrided) Si 3 N 4...

Slide 100/00/2008 1 Tunnel dielectric Trapping layer Blocking layer Gate material SiO 2 (nitrided) Si 3 N 4 Al 2 O 3 Ta Standard TANOS Options investigated in GOSSAMER SiO…

Documents Tunnel dielectric

GOSSAMER Overview 1 Tunnel dielectric Trapping layer Blocking layer Gate material SiO2 (nitrided) Si3N4 Al2O3 Ta Standard TANOS Options investigated in GOSSAMER SiO2 different…