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Documents Determining the Optical Constants of EUV Reflectors Jedediah Johnson Dr. David Allred.

Determining the Optical Constants of EUV Reflectors Jedediah Johnson Dr. David Allred Talk Outline Background physics/applications Project Motivation Previous measurement…

Documents Thorium Oxide Thin Films as EUV Reflectors

Thorium Oxide Thin Films as EUV Reflectors Jed Johnson Dr. David D. Allred Brigham Young University Reflectors in EUV range EUV range is about 50-1500Ã General Challenges:…

Documents Thorium Based Thin Films as EUV Reflectors Jed Johnson Brigham Young University.

Thorium Based Thin Films as EUV Reflectors Jed Johnson Brigham Young University Reflectors in EUV range EUV range is about 100-1000Å General Challenges: - hydrocarbon buildup…

Documents REMOVING SURFACE CONTAMINATES FROM SILICON WAFERS

REMOVING SURFACE CONTAMINATES FROM SILICON WAFERS Jed Johnson Brigham Young University Reflectors in EUV range EUV range is about 100-1000Å General Challenges: - multilayers…