Determining the Optical Constants of EUV Reflectors Jedediah Johnson Dr. David Allred Talk Outline Background physics/applications Project Motivation Previous measurement…
Thorium Oxide Thin Films as EUV Reflectors Jed Johnson Dr. David D. Allred Brigham Young University Reflectors in EUV range EUV range is about 50-1500Ã General Challenges:…
Thorium Based Thin Films as EUV Reflectors Jed Johnson Brigham Young University Reflectors in EUV range EUV range is about 100-1000Å General Challenges: - hydrocarbon buildup…
REMOVING SURFACE CONTAMINATES FROM SILICON WAFERS Jed Johnson Brigham Young University Reflectors in EUV range EUV range is about 100-1000Å General Challenges: - multilayers…