Cyclic deep reactive ion etching with mask replenishment T.N. Adam, S. Kim, P. Lv, G. Xuan, S. K. Ray, R. T. Troeger, D. Prather, and J. Kolodzey Department of Electrical…
Slide 1 Microelectronic Device Fabrication Prof. Dr. Ir. Djoko Hartanto, M.Sc Arief Udhiarto, S.T,M.T Electrical Engineering Department University of Indonesia Slide 2 Terms…