Documents THESIS Integrated Thin Film Electroluminescence Displays LETFEL

Feasibility of a Laterally Emitting Thin Film Electroluminescence Device as an Application Specic Integrated Display Dipl.-Ing. Jörg Rüdiger August 30, 2008 Statement of…

Engineering 2006 01 25_icrp

1. 1 Feature Profile Evolution and Microscopic Uniformity during Polysilicon Gate Etching in Cl2/O2 and Cl2/HBr/O2 Plasmas Feature Profile Evolution and Microscopic Uniformity…