Finite Element Analysis ¨ 3D models built and exported from MEMS Pro – .ANF format: ANSYS neutral format – .SAT format: ACIS text format (compatible with most FEA, RF…
1 ANSYS MEMS Features MEMSCAP® Yiching Liang March 6, 2002 22 Finite Element Analysis ¨ 3D models built and exported from MEMS Pro â .ANF format: ANSYS neutral format…