III. Wet and Dry Etching Wet Method Environment and Equipment Advantage Chemical Solutions Atmosphere, Bath 1) Low cost, easy to implement 2) High etching rate 3) Good selectivity…
1SNT5039 Nano Processing (Etching Technology) 1. PLASMA ETCHING FUNDAMENTALS - PLASMA ETCHING MECHANISMS - ETCHING PROCESS VARIABLES - ETCHING PROCESS REQUIREMENTS 2. ISSUES…
Slide 1 Chapter 10 Etching Introduction to etching. Wet chemical etching: isotropic. Anisotropic etching of crystalline Si. Dry etching overview. Plasma etching mechanism.…