Sensors and Actuators A 165 (2011) 2–7 Contents lists available at ScienceDirect Sensors and Actuators A: Physical journa l homepage: www.e lsev ier .co Capacit ap Hong-Ki…
Sensors and Actuators A 165 (2011) 2–7 Contents lists available at ScienceDirect Sensors and Actuators A: Physical journa l homepage: www.e lsev ier .co Capacit ap Hong-Ki…