Slide 11.Introduction and application. 2.Dopant solid solubility and sheet resistance. 3.Microscopic view point: diffusion equations. 4.Physical basis for diffusion. 5.Non-ideal…
Slide 1CHAPTER 8: THERMAL PROCESS (continued) Slide 2 Diffusion Process The process of materials move from high concentration regions to low concentration regions, driven…
Slide 1 Introduction and application. Dopant solid solubility and sheet resistance. Microscopic view point: diffusion equations. Physical basis for diffusion. Non-ideal and…