Slide 1Evaluating Baseline Deposition and Etch Recipes for Silicon Dioxide and Silicon Nitride using PECVD and RIE Tools Presented by Ayesha K. Denny NNIN RET GIFT Fellow…
Molecular Dynamics Study of Ballistic Rearrangement of Surface Atoms During Ion Bombardment on Pd(001) Surface Sang-Pil Kim and Kwang-Ryeol Lee Computational Science Center…
Molecular Dynamics Study of Ballistic Rearrangement of Surface Atoms During Ion Bombardment on Pd(001) Surface Sang-Pil Kim and Kwang-Ryeol Lee Computational Science Center…
Slide 1 ARGUS 54 - Optical Sputter Coater Vacuum Process Technology LLC Dr. Keqi Zhang & Ralph Faber May 1, 2013 Motivations: Offer a deposition tool for optical coating…