Contamination Reduction: Clean Rooms, Wafer Cleaning and Gettering Level 1 Contamination Reduction: Clean Factories Class X means that in each cubic foot of air in the factory,…
Slide 1 January 22, 20011 Advanced Modular Sample System Richard E. Hughes Slide 2 January 22, 20012 15915 So. San Pedro St. Gardena, CA 90248 (310) 515-2866 [email protected]…