Slide 1 Interference Assisted Lithography (IAL): A Way to Contain the Lithography Costs for the 32nm and 22nm Half-Pitch Device Generations Rudi Hendel; David Markle; John…
Slide 1 SUTD has integrated dozens of designettes across courses and years Slide 2 Developing and exploring the anatomy of a designette Introduce fundamentals - Lecture 3…