Documents c5lc90049b

1. Lab on a Chip EDITORIAL Cite this: DOI: 10.1039/c5lc90049b DOI: 10.1039/c5lc90049b www.rsc.org/loc The art in science of MicroTAS: the 2014 issue† Darwin R. Reyes For…

Documents Silicon Programming--Introduction to MEMS 1 Introduction to MEMS; energy domains; mechanical and...

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Slide 1 Silicon Programming--Introduction to MEMS 1 Interfacing--MEMS; energy domains; mechanical and fluidic devices Slide 2 Silicon Programming--Introduction to MEMS 2…