Documents Chang Liu MASS UIUC A brief history of MEMS fabrication Chang Liu Micro Actuators, Sensors, Systems....

Slide 1Chang Liu MASS UIUC A brief history of MEMS fabrication Chang Liu Micro Actuators, Sensors, Systems Group University of Illinois at Urbana-Champaign Slide 2 Chang…

Documents Chang Liu MASS UIUC Micromachined Piezoelectric Devices Chang Liu Micro Actuators, Sensors, Systems....

Slide 1 Chang Liu MASS UIUC Micromachined Piezoelectric Devices Chang Liu Micro Actuators, Sensors, Systems Group University of Illinois at Urbana-Champaign Slide 2 Chang…