Documents Electron beam lithography (EBL) 1.Overview and resolution limit. 2.Electron source (thermionic and.....

Slide 1 Electron beam lithography (EBL) 1.Overview and resolution limit. 2.Electron source (thermionic and field emission). 3.Electron optics (electrostatic and magnetic…

Documents Electron beam lithography (EBL)

Slide 1 Electron beam lithography (EBL) Overview and resolution limit. Electron source (thermionic and field emission). Electron optics (electrostatic and magnetic lens).…