Slide 1 Nano-Electronics S. Mohajerzadeh University of Tehran Slide 2 Lithography, nano-technology Lithography is transferring a desired pattern from a “mask” onto a…
Slide 1 Scanning probe microscopy (SPM) and lithography Atom and particle manipulation by STM and AFM. AFM oxidation of Si or metals. Dip-pen nanolithography (DPN). Resist…