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SU-8 Testing 1 SU-8 Testing (v1l) Thin SU8 on glass slide Test: Soft Bake (SB) and Post Exposure Bake (PEB) 2 “Control” Recipe Spin Coating: 10 s @ 500 rpm; 30 s @ 2000…

Documents 1 SU-8 Testing (v1l) Thin SU8 on glass slide Test: Soft Bake (SB) and Post Exposure Bake (PEB)

SU-8 Testing 1 SU-8 Testing (v1l) Thin SU8 on glass slide Test: Soft Bake (SB) and Post Exposure Bake (PEB) 2 “Control” Recipe Spin Coating: 10 s @ 500 rpm; 30 s @ 2000…