ZMTZero Metrology Time
ADD Presentation
System Requirements
Two main requirements:1. Implementation Inspection
policies (scheduling algorithms) that will extand the current AutoSched software :Taking to account two new concepts
that aren’t implemented at all in the current system:
1. metrology machines2. yield
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System Requirements
2. Simulation running environment:
Develop a user-friendly and intuitive environment for running experiments where a reasercher can easily:1. Saving and loading simulation variables and
results.2. Analyzing simulation results – making
graphs, tables, etc…3. Running the simulations from our application
instead of AutoSched.
System Requirements
System Architecture
Main classes
Class Diagram
Tables Description
User Interface
Algorithms
Open questionsAnd Challenges
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System Requirements
System Architecture
Main classes
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Tables Description
User Interface
Algorithms
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Research environment
MySql server
database
AutoSched
Autosched plugin
.…
Algo implementati
on n
Event handler
Algo implementati
on1
System Architecture
Experiment editing
Experiment running
Experiment results analysis
Experiment Handler
Autosched Handler
Experiment results analyser
1 .Research environment
Application handlers
GUI
2 .AutoSched IP implementer
System Architecture
Our system is build from 4 main parts:
1. Research environment2. AutoSched IP Implementer3. The AutoSched System4. SQL DataBase
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System Architecture
1. Research environmentThis part is responsible for efficiently
organizing , saving ,and analyzing the data from the different experiments.
It is build from two main parts:1. The GUI2. The Application handlers
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Tables Description
User Interface
Algorithms
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System Architecture
1. Research environment1.1 The GUI:The GUI is responsible for getting input from the user and
presenting the output back to the user.It can be divided to 3 major parts:a. Experiment editing:
a.1 navigating inside an experiment environment,a.2 importing experimentsa.3 adding new experiments.
b. Experiment running:
This part Includes windows and frames for running an experiment.
c. Experiment results analysis:
c.1 choosing analysis options, attributes c.2 windows that shows the analysis results (graphs, tables, etc…).
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System Architecture
1. Research environment1.2 The Application handlers:The application handlers are responsible for the correct flow of
the program. It includes the following parts:a. Experiment handler:
Responsible for loading/saving/importing experiments, creatingnew experiments, etc…It works with an outer MySQL server to save the data and do various types of queries.
b. AutoSched handler:
Responsible for running AutoSched. It includes making a temp excel input file for the excel and sending command for the AutoSched to run.
c. Experiments results analyzer:Getting results data from the experiment handler and running analysis of various kinds on the data - Prepare a user friendly analysis report
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System Architecture
2 . AutoSched IP ImplementerThe AutoSched IP Implementer is responsible for calculating an
AP problem answer according to the chosen Inspection Policy (IP).
It is divided into a couple of parts:2.1 Event handler:
This part is waiting for the AutoSched to generate a real time event (it's a listener), propagates the event to the relevant component and sends back the AP answer to the AutoSched.
2.2 Algorithm implementation:This part actually solves the AP problem given by the AutoSched according to a certain inspection policy.
We are going to implement several components like this, but the system will be modular enough for writing additional inspection policy implementation components in the future.
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System Architecture
3. AutoSchedThis is a 3rd party program designed to simulate a
semi conductor FAB.Much of the challenges in this project is related to
achieving the goals of the researchers by using wisely and even overcoming the restrictions this software impels.
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System Architecture
4. SQL DataBaseWhere we will keep all of the data about
experiments input, results, experiment environments and User data.
We have decided to transform the data from the Excel file the AutoSched outputs, in order that it would be easier for the researchers to analyze the data from different experiments (By using SQL-queries)
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Main Classes – 1. Reaserch Environment
1.1 The presentation layer:
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Main Classes – 1. Reaserch Environment
1.2 The application layer:
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Main Classes – 1. Reaserch Environment
1.3 The Domain layer:
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Main Classes – 1. Reaserch Environment
1.4 persistence layer
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Main Classes – 2. AutoSched IP Implementer
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User interface
1. The User Interface concept is based on frames (resembles tabs in an internet browser).
2. There is a frame for each functionality of the system, and several frames can be opened symultancely (Except for the the one running the experimnets – because of the limitation of the AutoSched)
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User interface1. The Main Menu:
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User interface2. Opening an Environment:
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User interface3. Running Experiments
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User interface4. Running in progress
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Algorithms (inspection policies)
The researchers we are working with are developing and testing about 10 Inspection policies.
For example:ME&A (Metrology Empty & Alpha)If Metrology tool is Empty AND If Alpha is greater than x, send lot to inspectionPolicy was run with parameter 0.25 ≤ x ≤ 1, where: "1" requires to always send if metrology empty (identical to MLT with
0) "0.85", "0.7", "0.55", "0.4", "0.25" requires to send if random Alpha
(0<α<1) is greater than 0.85, 0.7, 0.55, 0.4, 0.25 and metrology empty
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Algorithms (inspection policies)
The inspetion policies are tested and checked in order to find the best one:
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0.997
0.9972
0.9974
0.9976
0.9978
0.998
0.9982
4 4.5 5 5.5 6 6.5 7
Yiel
d
Cycle Time
Cycle Time vs. Yield (Scenario 1111)
FR
MLT
ME&a
DMT
ME&BMT
MLT1&BMT
N&O1
N&O2
N&O3
FL
Algorithms (inspection policies)
The Inspection policies are tested on this model, called the“cell” model:
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Open questionsand challenges
1. adjusting the given scheduling from the “cell” model to the AutoSched model
2. Integrating with the AutoSched system.
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Open questionsand challenges
3. Make the system as modular as possible:
3.1To enable data collection according to two aspects:
1. by operations – “lot 5 has finished the 7th stage in the route”, we aren’t interested in the specific machine2. By tools – “lot 5 finished the 7th Stage in machine x and goes to machine y”
3.2 Enabling different Inspection policies to different parts of the line
4. Make the Research environment as easy and intuitive to users as possible.
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Task list
1. 31/3 – present the prototype The prototype will include:
a. a relatively simple inspection policyb. a GUI suitable for the implemented
inspection policy.c. capability for calculating yield according to
outputs (“after-yield”). 2. 27/4 – on-line yield calculation
This means that the yield calculation will be modeled as part as the system (Hence: calculated “on-line”)
3. 13/5 – adding more complex Inspection PoliciesAdding inspection policies that needs more data from the AutoSched system and more adaptations in relate to the theoretical “Cell” model.
System Requirements
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Main classes
Class Diagram
User Interface
Algorithms
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Any Questions?
System Requirements
System Architecture
Main classes
Class Diagram
User Interface
Algorithms
Open questionsAnd Challenges
Task List