TES THERMAL EVAPORATION SOURCE The Korvus TES thermal boat sources allow quick removal of the sources to allow replenishment of the evaporant material. Boats and filaments can also be easily and Thermal evaporation sources are rapidly replaced. generally used for basic thin film deposition processes. The The TES sources are available as evaporant material is placed in a either single-source per flange or as conductive boat or alternatively a a two-source unit. Optionally, crucible held in a resistive coil. The thermocouples may be mounted to boat or coil is heated by passing a monitor the boat temperature. Each high electrical current through it. As source can be equipped with a the temperature of the boat rises, manual or automatic shutter. the material in the boat begins to evaporate. The temperature, and Up to five single sources (or ten in hence the evaporation rate of the the case of dual sources) may be material, is controlled by the amount accommodated in one system. The of applied current. sources can also be used in conjunction with other techniques One important advantage of thermal such as sputtering, e-beam evaporation is that no process gas is deposition and low-temperature required so the process can be sources. performed under very high vacuum conditions resulting in very few impurities being incorporated into the deposited films. www.korvustech.com Contact metallisation AR coatings Simple Operation Dual source option KORVUS TECHNOLOGY
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TESTHERMAL
EVAPORATION SOURCE
The Korvus TES thermal boat sources allow quick removal of the sources to allow replenishment of the evaporant material. Boats and filaments can also be easily and
Thermal evaporation sources are rapidly replaced. generally used for basic thin film deposit ion processes. The The TES sources are available as evaporant material is placed in a either single-source per flange or as conductive boat or alternatively a a two-source unit. Optionally, crucible held in a resistive coil. The thermocouples may be mounted to boat or coil is heated by passing a monitor the boat temperature. Each high electrical current through it. As source can be equipped with a the temperature of the boat rises, manual or automatic shutter.the material in the boat begins to evaporate. The temperature, and Up to five single sources (or ten in hence the evaporation rate of the the case of dual sources) may be material, is controlled by the amount accommodated in one system. The of applied current. sources can also be used in
conjunction with other techniques One important advantage of thermal such as sputter ing, e-beam evaporation is that no process gas is deposition and low-temperature required so the process can be sources. performed under very high vacuum conditions resulting in very few impurities being incorporated into the deposited films.
www.korvustech.com
Contact metallisation
AR coatings
Simple Operation
Dual source option
KORVUS TECHNOLOGY
TESTe
chnic
al Speci
fica
tions
Auto Shutter
Power In
Boat
Shutter
Boat Volume:
Power Supply:
Temperature Range: o 50-2200 C (material dependent)
1cc to 5cc
DC, 600W. 1.5kW optional
The Old Fishery, Holcombe Lane, Newington, Oxfordshire, OX10 7AJ, UK
T: +44 1494 264224 [email protected]
www.korvustech.com
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