Technologies for Realizing Carbon Nanotube Vias XU Hua 20171013 26 Nov 2014
Technologies for Realizing Carbon Nanotube Vias
XU Hua2017101326 Nov 2014
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Content
• Introduction of CNT technology
• Types of via fabrication process– Top-down fabrication process– Bottom-up fabrication process
• Problems to solve
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Introduction of CNT technology
• Trends of applying CNT technology
• Benefits:– CNT is very good heat
conductor to allow faster processing
thermal conductivity:
3500 W·m−1·K−1
Defects:– The resistance of CNT is not
low enough
Uncertainty:– Toxicity of CNT and its catalyst
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Top-down fabrication process
Synthesizing:Carbon nanotube (CNT) are grown from catalyst: Co, Fe, Ni Gas source: CH4, C2H2 etc; H2 & N2 as etching gas
equipment for catalyst deposition schematic of top-down process
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Top-down fabrication process
Examples of top-down process
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Top-down fabrication process
Result of top-down process----large variation
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Bottom-up fabrication process
Schematic of bottom-up process
Advantages:
More stable structure;Chemical mechanical polishing result in smooth surface;The CNT have the same height.
Disadvantages:
Tetraethylorthosilicate CVDform voids inside;CNT are not perfectly aligned.
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Bottom-up fabrication process
Defect in bottom-up process
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Problems to solve
• Resistance not low enough– 0.59 Ω for 2-μm CNT via in top-down process– 300 kΩ for 2-μm CNT via in bottom-up process– Higher CNT density will decrease the resistance
• The structure synthesized varies a lot– The two technologies can be combined to have better CNT structure
References:[1] Shintaro Sato, Mizuhisa Nihei, Atsushi Mimura, Novel approach to fabricating carbon nanotube via interconnects usingsize-controlled catalyst nanoparticles, 2006 IEEE
[2] Makoto Suzuki,Yusuke Ominami, Takashi Sekiguchi, and Cary Y. Yang, Secondary electron imaging of embedded defects in carbon nanofiber via interconnects, 2008 American Institute of Physics
[3] Jun Li, Qi Ye, Alan Cassell, Hou Tee Ng, Bottom-up approach for carbon nanotube interconnects, January 2003, Applied Physics Letters
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Thank you!