R esistivity M easurement S ystems Touch Screen Insulation Resistance www.dasoleng.com Silicon Wafer Solar Cell Metal Resistivity
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Resistivity Measurement Systems
Touch Screen
Insulation Resistance
www.dasoleng.com
Silicon Wafer
Solar Cell
Metal Resistivity
1
Auto Station Z
Line Resistance Meter
- Z-Axis Auto-Repeat Measurement - Many Silicon Wafer Measurement - Size : 220(W) X 440(L) X 260(H) - Infinite Repeat System
- Four Electrode Method- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Conductivity Measurement
Powder Resistance Tester(PC)- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Load Cell : Max. 2t- Height Gage : Mitutoyo products- PC Connection System
2
Powder Resistance Tester(Manual)
Electric Conductor Tester
- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Load Cell : Max. 2t- Height Gage : Mitutoyo products
- Coating Sheet Check- Use the buzzer and the ramp- Measuring the buzzer rings- Use 9V battery
Metal Resistivity- Four Electrode Method- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Resistivity & Conductivity Measurement
3
Portable Type
① Specification ◇ Measurement Method : Dual Configuration Method ◇ Model (Only Sheet Resistance) FPP-400 : 4 mΩ/sq. ~ 450 Ω/sq. FPP-2000 : 2 Ω/sq. ~ 2000 Ω/sq. FPP-2400 : 40 mΩ/sq. ~ 4000 Ω/sq. FPP-40k : 0.4 Ω/sq. ~ 40 kΩ/sq. ◇ Measurement Resolution : 3½ digits ◇ Measurement Accuracy : ±1.0% of reading ◇ Pin spacing : 1.00㎜ ~ 5.00㎜ ◇ Pin Radius : 100㎛ ~ 700㎛ ◇ Measurement Time : 1 sec ◇ Size : Main body(Width : 92㎜, Length : 165㎜, Thickness 30㎜)
② Environment ◇ Temperature : 23 ± 5℃ ◇ Humidity : 30 ~ 70%
③ Electric Power (Internally Charged Battery) ◇ Adapter Rated Input : AC 100V ~ 240V, 50 ~ 60㎐ ◇ Adapter Rated Output : DC 12V
Sample Size : 300㎜ × 300㎜
XYZ-axis manual moving system
Sample Size : Ø200㎜
Z-axis manual measurement
Option - Station
Station은 Probe를 본 Station에 간단하게 부착하여 사용하는 것으로 주로 연구 분석용으로재현성이 요구되거나 측정 시료가 작아서 측정이 곤란한 경우 사용하는 장치입니다.
Use : Touch Screen, Solar Cell
4
Resistivity Meter
Resistivity MeterModel - RS8(1G)① Features ◇ Single, Dual, Mono, Bulk Mode Measurement Selection. ◇ Direct Ω , S/㎝ , Ω/sq. , Ω·㎝ Conversion. ◇ Bulk mode for solar cell bulk type material. ◇ Very flexible and customized probe needle and measurement unit. (Probe tension, probe radius, probe interval)
② Specification ◇ Measurement Method : Single & Dual Configuration Method ◇ Model : 1 mΩ/sq. ~ 1 GΩ/sq. ◇ Measurement Resolution : 4½ digits ◇ Measurement Accuracy : ±1.0% of reading ◇ Pin spacing : 1.00㎜ ~ 5.00㎜ ◇ Pin Radius : 100㎛ ~ 700㎛ ◇ Measurement Time : 1 sec ◇ Source current Range : 10nA ~ 100mA
③ Environment ◇ Temperature : 23 ± 5℃ ◇ Humidity : 30 ~ 70%
④ Electric Power ◇ Rated Input : AC 100V ~ 240V, 50 ~ 60㎐
Model - HS8(40k, 1G)
① Features ◇ Single, Dual, Bulk Mode Measurement Selection. ◇ Direct Ω , Ω/sq. , Ω·㎝ Conversion. ◇ Bulk mode for solar cell bulk type material. ◇ Very flexible and customized probe needle and measurement unit. (Probe tension, probe radius, probe interval)
② Specification ◇ Measurement Method : Single & Dual Configuration Method ◇ Model HS8-40k : 10 mΩ/sq. ~ 40 kΩ/sq. HS8-1G : 1 kΩ/sq. ~ 1 GΩ/sq. ◇ Measurement Resolution : 3½ digits ◇ Measurement Accuracy : ±1.0% of reading ◇ Pin spacing : 1.00㎜ ~ 5.00㎜ ◇ Pin Radius : 100㎛ ~ 700㎛ ◇ Measurement Time : 1 sec ◇ Source current Range : 10nA ~ 100mA
③ Environment ◇ Temperature : 23 ± 5℃ ◇ Humidity : 30 ~ 70%
④ Electric Power ◇ Adapter Rated Input : AC 100V ~ 240V, 50 ~ 60㎐ ◇ Adapter Rated Output : DC 12V
5
Automatic Type
① Features
1) XYZ-Axis robot fully automatic moving system
2) Automatic resistance range selection
3) Measuring size(rectangle type)
: 600㎜ × 600㎜(user defined produce)
4) Perfect remote control by operation software
5) Data analysis uniformity, avg, max, min, 2D 3D-mapping, capture...
6) Specimen : thin film (ito, izo, lcd, touch panel, solar cell...)
7) Specimen vacuum holder & air blower unloading
② Specifications
1) Measuring method : contacted by 4-Point Probe
2) Configuration : single or dual (user chose)
3) Measuring Range sheet Resistance : 1mΩ/sq. ~ 1GΩ/sq.
4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)
5) Measuring time : range search max. 6s search after actual 1s
6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)
7) Pin load 60g/pin ~ 200g/pin
8) Pin radius 50㎛ ~ 700㎛(order made/chose)
9) Tolerance : ±0.01㎜
10) Pin material : TH-tungsten or BC-beryllium copper
11) Serial communication : RS232C
③ Utility
1) Current source : 10㎁ ~ 100㎃
2) DVM 0.00V ~ 2.5V
3) Power requirements line voltage : AC 220V ±10%
4) Line frequency : 50㎐ ~ 60㎐
5) Temperature range : 23℃ ±5℃
6) Relative humidity : 30% ~ 70%
Use : Touch Screen, Solar Cell, Silicon Wafer Insulation Resistance
6
① Features
1) XY-Axis robot Z-Cylinder fully automatic moving system
2) Automatic resistance range selection
3) Measuring size(Circular type)
: Ø300㎜(user defined produce)
4) Perfect remote control by operation software
5) Data analysis
uniformity, avg, max, min, 2D 3D-mapping, capture...
6) Specimen : thin film
(ito, izo, lcd, solar cell...)
7) Specimen vacuum holder & air blower unloading
② Specifications
1) Measuring method : contacted by 4-Point Probe
2) Configuration : single or dual (user chose)
3) Measuring Range sheet Resistance : 1mΩ/sq. ~ 1GΩ/sq.
4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)
5) Measuring time : range search max. 6s search after actual 1s
6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)
7) Pin load 60g/pin ~ 200g/pin
8) Pin radius 50㎛ ~ 700㎛(order made/chose)
9) Tolerance : ±0.01㎜
10) Pin material : TH-tungsten or BC-beryllium copper
11) Serial communication : RS232C
③ Utility
1) Current source : 10㎁ ~ 100㎃
2) DVM 0.00V ~ 2.5V
3) Power requirements line voltage : AC 220V ±10%
4) Line frequency : 50㎐ ~ 60㎐
5) Temperature range : 23℃ ±5℃
6) Relative humidity : 30% ~ 70%
Use : Solar Cell, Silicon Wafer, Touch Panel
7
Use : Cell Phone Glass, Touch Screen, Solar Cell
① Features1) XYY2Z-4Axis robot fully automatic moving system2) Automatic resistance range selection3) Measuring size(rectangle type) : user defined produce4) Perfect remote control by operation software5) Data analysis uniformity, avg, max, min, 2D-mapping, capture...6) Specimen : thin film (ito, izo, lcd, touch panel, solar cell...)7) Six-Head : Simultaneous Measurement System
② Specifications1) Measuring method : contacted by 4-Point Probe2) Configuration : single or dual (user chose)3) Measuring Range sheet Resistance : 1mΩ/sq. ~ 1GΩ/sq.4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)5) Measuring time : range search max. 6s search after actual 1s6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)7) Pin load 60g/pin ~ 200g/pin8) Pin radius 50㎛ ~ 700㎛(order made/chose)9) Tolerance : ±0.01㎜10) Pin material : TH-tungsten or BC-beryllium copper11) Serial communication : RS232C
③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%
③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%
① Features1) XYZ-Axis robot fully automatic moving system2) Automatic resistance range selection3) Measuring size(rectangle type) : 1300㎜ × 1300㎜(user defined produce)4) Perfect remote control by operation software5) Data analysis uniformity, avg, max, min, 2D 3D-mapping, capture...6) Specimen : thin film (ito, izo, lcd, touch panel, solar cell...)7) Specimen vacuum holder & air blower unloading
② Specifications1) Measuring method : contacted by 2-Point Probe2) Configuration : single3) Measuring Range Resistance : 1mΩ ~ 60MΩ4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)5) Measuring time : range search max. 6s search after actual 1s6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)7) Pin load 60g/pin ~ 200g/pin8) Pin radius 50㎛ ~ 700㎛(order made/chose)9) Tolerance : ±0.01㎜10) Pin material : TH-tungsten or BC-beryllium copper11) Serial communication : RS232C
Use : Insulation Resistance, Solar Cell
8
③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%
③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%
Intuitive Software
[2D Graph] [3D Graph]
Auto Meter Measurement Screen
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Measurement Principal
① Single Configuration Method. (Config. A)
【 】
F2(D) : Sample size correction factor for the probe spacing
F(t/S) : Sample thickness and probe calibration factor for the interval
Fsp : Correction factor for the probe spacing
② Dual Configuration Method.(Config. A & B)
Rs Equation of Single & Dual configuration method
10
Uniformity & Edge effects
<Box Type> <Cylinder Type> <Custom & Pen Type>
Comparison : Single & dual Configuration
Various 4 Point Probe
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