os, 9/16/99 MICROMACHINING AND MICROFABRICATION TECHNOLOGY FOR ADAPTIVE OPTICS Olav Solgaard Acknowledgements: P.M. Hagelin, K. Cornett, K. Li, U. Krishnamoorthy, D.R. Pedersen, M. H. Guddal, E.J. Carr, V. Laible, BSAC: R.S. Muller, K. Lau, R. Conant, M. Hart Research Funding: NSF, BSAC, SMART
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Os, 9/16/99 MICROMACHINING AND MICROFABRICATION TECHNOLOGY FOR ADAPTIVE OPTICS Olav Solgaard Acknowledgements: P.M. Hagelin, K. Cornett, K. Li, U. Krishnamoorthy,
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os, 9
/16/
99
MICROMACHINING AND MICROFABRICATION TECHNOLOGY
FOR ADAPTIVE OPTICSOlav Solgaard
Acknowledgements:P.M. Hagelin, K. Cornett, K. Li, U. Krishnamoorthy, D.R. Pedersen, M. H. Guddal, E.J. Carr, V. Laible,
BSAC: R.S. Muller, K. Lau, R. Conant, M. Hart
Research Funding:
NSF, BSAC, SMART
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/16/
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MIRRORS
Texas Instrument’s DMD
NASA's Next Generation Space Telescope (2008) with 4M micromirrors by Sandia NL
Lucent’s Optical X-Connect
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GRATINGS - DIFFRACTIVE OPTICS
Silicon Dioxide
Silicon Nitride
Silicon Substrate
25 to 100 µm
Top electrode 1-D and 2-D spatial light modulators (Projection displays - Silicon Light Machines)
Displacement sensors (AFM arrays - C. Quate)
Sensor integration, free-space communication
Diffractive lenses and holograms (Fresnel zone plates - M. Wu, UCLA)
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System on a chip
Laser-to-fiber coupling
Micropositioners of mirrors
and gratings
High-resolution raster scanner
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Why Micromachined Adaptive Optics?
Parallel processing, large arrays, system integration, diffractive optics• Standard IC materials and fabrication
• Integration of optics, mechanics, & electronics
Scaling of optics• Alignment, Resolution, Optical quality,