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Optical Components for Laser Applications Günter Toesko - Laserseminar BLZ im Dezember 2009 1
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Page 1: Optical Components for Laser Applications › fileadmin › user_upload › pdf › ... · 2019-10-02 · Optical Components for Laser Applications Günter Toesko - Laserseminar BLZ

Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 1

Page 2: Optical Components for Laser Applications › fileadmin › user_upload › pdf › ... · 2019-10-02 · Optical Components for Laser Applications Günter Toesko - Laserseminar BLZ

Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 2

AberrationsAberrations

An optical aberration is

a

distortion

in the image formed by

an

optical

system

compared

to

the

original. It can arise for

a

number

of

reasons due to the

limitations

of

optical components

such as

lenses

and

mirrors.

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 3

Spherical aberration

occurs

in a

spherical lens or mirror because these

do

not focus

parallel

rays

to a

point,

but instead along

a line. Therefore, off-axis rays are brought

to a

focus closer

to

the lens or mirror than are

on-axis rays.

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 4

Spherical aberration

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 5

Astigmatism

occurs

in

lenses because

a lens

has different

focal lengths for rays

of

different

orientations,

resulting in a distortion

of

the

image. In

particular,

rays

of light

from

horizontal and

vertical lines

in a plane on

the object are not

focused

to

the same

plane on

the edges of

the

image.

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 6

Astigmatism

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 7

Astigmatism

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 8

Distortionis caused because the transverse

magnification may be

a

function

of

the off-axis

image distance.

Distortion is

classified

as positive (so-called pincushion distortion),

or

negative (so-

called barrel distortion

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 9

Field curvature

results because the focal

plane

is actually not planar,

but spherical.

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 10

Field curvature

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 11

Astigmatism, Distortion, Field curvature

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 12

Chromatic aberration occurs in

lenses because

lenses

bring different

colors

of

light to a

focus

at different points

as

the refractive index changes with the wavelength.

V = Abbe number = measure of a material‘s dispersion

f1 * V1 + f2 * V2 = 0 1/f = 1/f1 + 1/f2

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 13

Chromatic aberration –

single lens

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 14

Chromatic aberration

-

achromat

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 15

Coma

occurs because

off-axis rays

no

not quite converge

at

the focal

plane.

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 16

Coma

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 17

Fiber Fiber collimatorcollimator

to be used with

an optical fiber

to provide

a collimated beam

focal length depending on the

NA and the required collimated beam diameter

single or multi-element system depending

on fiber core diameter

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 18

Collimator

-

Basics

focal length f

θ D

)sin(#2

1Θ=

⋅=

FNA

DfF =# NAfD ⋅⋅=⇒ 2

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 19

Collimator -

single lens or multi element

NA=0,14, f=80 mmD=?

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 20

Collimator

-

single lens or multi element

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 21

Afocal telescopesAfocal telescopes•

to provide

a collimated beam with

a certain

diameter (magnified

or

de-magnified)•

at least 2 lens elements–

Galilei > no internal

focus

Kepler > spacial

filter

possible

beam waist radius scales invers to divergence angle

wavefront maintanance•

lens

material

depending

on

the wavelength

adjustable divergence

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 22

Afocal Telescopes

• wavelength 355 nm • input aperture 10 mm• magnification 3.0• fully diffraction limited• adjustable divergence

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 23

AfocalAfocal

Zoom Zoom TelescopesTelescopes•

to provide

a collimated beam with a certain diameter

achieved by a variable (de-)magnification factor

at least 3 lens elements

depending

on requirements

Galilei > no

internal focus

Kepler >

spacial filter possible

beam waist radius scales invers to

divergence

angle

wavefront maintanance

lens

material

depending

on

the wavelength

adjustable divergence

Page 24: Optical Components for Laser Applications › fileadmin › user_upload › pdf › ... · 2019-10-02 · Optical Components for Laser Applications Günter Toesko - Laserseminar BLZ

Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 24

Zoom

Beam

Expander

• input aperture 18 mm• magnification 1.5 – 2.5• fully diffraction limited• total length remains constant

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 25

FF--theta scan lenstheta scan lens•

y‘ = f *

theta

[rad]

flat field

at the

image plane•

while standard focusing lenses deliver

a

focused spot

to

only one

point,

scan lenses deliver

a

focused spot

to

many points

on a

scan

field or workpiece. •

typical applications:–

laser materials Processing, e.g. marking, plastics welding, trimming, structuring

of

thin

film solar cells

rapid manufacturing, e.g. laser sintering, rapid tooling

..................................

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 26

F-theta scan lens –

single element

XY Scanner

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 27

F-theta scan lens

single element

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 28

F-theta scan lens –

multi element for fixed focus

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 29

F-theta scan lens

multi element for fixed focus

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 30

F-theta scan lens –

a real one

cover glass

Y mirrorX mirror

lens elements

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 31

F-theta scan lens

a real

one

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 32

Telecentric F-theta lens

• round spot shape • typical deviation from telecentricity in a XY scan system: <1° • smallest spot size variation in the image field• large fields > large lens diameters > costs

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 33

Focal

diameter

-

Basics

focal diameter (1/e²) =

D = 1/e² diameter prior focussing•

k = scale factor

4/π = 1.27 for an

unclipped beam (k/D ≅

0.25)clear aperture

diameter

2 * 1/e² beam

diameter

truncation loss approx. 0.03%–

1.41 (k/D ≅

0.21)

clear aperture

diameter

1.5 * 1/e²

beam

diameter truncation loss approx. 1%

1.83 (k/D ≅

0.18)1/e² beam

diameter

= clear aperture

diameter, truncation loss

approx. 13.5%

DMkfλ 2•••

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 34

Focal diameter

-

Basics 2

fiber: NA = 0.14, f = 80 mm ⇒ D = 22.4 mm

BPP = M²*Lambda/Pi = NA * fiber core radius

e.g. fiber core radius

100 µm ⇒ M² ≅

41 (1.064nm)M² = beam quality factor

= 1 for a perfect Gaussian beam

> 1 for

real lasers

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 35

Focal diameter

(1/e²) -

Example

fiber: NA = 0.14, f = 80 mm ⇒ D = 22.4 mm•

fiber core diameter 200 µm

f-theta scan lens with

f = 160 mm

spot size:–

using

M²=41 (1.064nm) ⇒ 400 µm

ratio of focal lengths 160/80 = 2

X fibre core diameter ⇒ 400 µm

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 36

Focal diameter

(1/e²) -

Example

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 37

Focal diameter

-

Example

image width 500 µm image width 200 µmfor M²=1 (single mode fiber)aberration free spot 30 µm

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 38

GhostsGhosts!!

• unwanted back-reflections can destroy scan mirrorsor lens elements

• low M² values can result in diffraction limited ghosts

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 39

Color Color corrected lens corrected lens systemssystems

online inspection

different wavelengths in one system

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 40

Color corrected lens systems –

Beamexpander

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 41

Color corrected lens systems –

Fused silica focussing lens

spot @ 1,064 nm

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 42

Color corrected lens systems –

fused silica focussing lens

• ideal lens, i.e. no aberrations

• CCD lens with f=120 mm

• CCD 6.4 mm x 4.8 mm (½“)

• visible range

CCD

• fused silica focussing lens f=120mm

• diffracton limited @ 1,064 nm

• magnification –1 , i.e. FOV ½“

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 43

Color corrected lens systems –

fused silica focussing lens

original ups....

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 44

Color corrected lens systems –

the solution!

spot @ 1,064 nm

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 45

• lens system with a mix of lens materials• diffraction limited focus for 1,064 nm• very good image quality even for small CCD pixels (here 10 µm)

Color corrected lens systems –

the solution!

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 46

Color corrected lens systems –

f-theta lens

CCD objective

F-Theta objective

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 47

Color corrected lens systems –

f-theta lens

•color corrected for 532/1,064nm

•focal length 254 mm•dual AR

coating

•beam diameter 15 mm

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 48

Color corrected lens systems –

f-theta lens

originalcenter of scan field

LED illumination 532 nm +/- 10 nm

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 49

Color corrected lens systems –

f-theta lens

corner of scan field> small lateral color error

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 50

Color corrected lens systems –

f-theta lens

• lens system with a mix of lens materials• diffraction limited focus for 1,064 nm and 532 nm• LED bandwidth of 20 nm at 532 nm acceptable• very good image quality even for small CCD pixels (here 10 µm)

color correction pays off!

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Optical Components for Laser Applications

Günter Toesko - Laserseminar BLZ im Dezember 2009 51

It is over nowIt is over now......