Optical Components for Laser Applications Günter Toesko - Laserseminar BLZ im Dezember 2009 1
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 1
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 2
AberrationsAberrations
An optical aberration is
a
distortion
in the image formed by
an
optical
system
compared
to
the
original. It can arise for
a
number
of
reasons due to the
limitations
of
optical components
such as
lenses
and
mirrors.
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 3
Spherical aberration
occurs
in a
spherical lens or mirror because these
do
not focus
parallel
rays
to a
point,
but instead along
a line. Therefore, off-axis rays are brought
to a
focus closer
to
the lens or mirror than are
on-axis rays.
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 4
Spherical aberration
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 5
Astigmatism
occurs
in
lenses because
a lens
has different
focal lengths for rays
of
different
orientations,
resulting in a distortion
of
the
image. In
particular,
rays
of light
from
horizontal and
vertical lines
in a plane on
the object are not
focused
to
the same
plane on
the edges of
the
image.
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 6
Astigmatism
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 7
Astigmatism
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 8
Distortionis caused because the transverse
magnification may be
a
function
of
the off-axis
image distance.
Distortion is
classified
as positive (so-called pincushion distortion),
or
negative (so-
called barrel distortion
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 9
Field curvature
results because the focal
plane
is actually not planar,
but spherical.
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 10
Field curvature
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 11
Astigmatism, Distortion, Field curvature
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 12
Chromatic aberration occurs in
lenses because
lenses
bring different
colors
of
light to a
focus
at different points
as
the refractive index changes with the wavelength.
V = Abbe number = measure of a material‘s dispersion
f1 * V1 + f2 * V2 = 0 1/f = 1/f1 + 1/f2
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 13
Chromatic aberration –
single lens
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 14
Chromatic aberration
-
achromat
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 15
Coma
occurs because
off-axis rays
no
not quite converge
at
the focal
plane.
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 16
Coma
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 17
Fiber Fiber collimatorcollimator
•
to be used with
an optical fiber
to provide
a collimated beam
•
focal length depending on the
NA and the required collimated beam diameter
•
single or multi-element system depending
on fiber core diameter
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 18
Collimator
-
Basics
focal length f
θ D
)sin(#2
1Θ=
⋅=
FNA
DfF =# NAfD ⋅⋅=⇒ 2
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 19
Collimator -
single lens or multi element
NA=0,14, f=80 mmD=?
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 20
Collimator
-
single lens or multi element
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 21
Afocal telescopesAfocal telescopes•
to provide
a collimated beam with
a certain
diameter (magnified
or
de-magnified)•
at least 2 lens elements–
Galilei > no internal
focus
–
Kepler > spacial
filter
possible
•
beam waist radius scales invers to divergence angle
•
wavefront maintanance•
lens
material
depending
on
the wavelength
•
adjustable divergence
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 22
Afocal Telescopes
• wavelength 355 nm • input aperture 10 mm• magnification 3.0• fully diffraction limited• adjustable divergence
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 23
AfocalAfocal
Zoom Zoom TelescopesTelescopes•
to provide
a collimated beam with a certain diameter
achieved by a variable (de-)magnification factor
•
at least 3 lens elements
depending
on requirements
–
Galilei > no
internal focus
–
Kepler >
spacial filter possible
•
beam waist radius scales invers to
divergence
angle
•
wavefront maintanance
•
lens
material
depending
on
the wavelength
•
adjustable divergence
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 24
Zoom
Beam
Expander
• input aperture 18 mm• magnification 1.5 – 2.5• fully diffraction limited• total length remains constant
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 25
FF--theta scan lenstheta scan lens•
y‘ = f *
theta
[rad]
•
flat field
at the
image plane•
while standard focusing lenses deliver
a
focused spot
to
only one
point,
scan lenses deliver
a
focused spot
to
many points
on a
scan
field or workpiece. •
typical applications:–
laser materials Processing, e.g. marking, plastics welding, trimming, structuring
of
thin
film solar cells
–
rapid manufacturing, e.g. laser sintering, rapid tooling
–
..................................
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 26
F-theta scan lens –
single element
XY Scanner
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 27
F-theta scan lens
–
single element
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 28
F-theta scan lens –
multi element for fixed focus
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 29
F-theta scan lens
–
multi element for fixed focus
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 30
F-theta scan lens –
a real one
cover glass
Y mirrorX mirror
lens elements
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 31
F-theta scan lens
–
a real
one
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 32
Telecentric F-theta lens
• round spot shape • typical deviation from telecentricity in a XY scan system: <1° • smallest spot size variation in the image field• large fields > large lens diameters > costs
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 33
Focal
diameter
-
Basics
focal diameter (1/e²) =
•
D = 1/e² diameter prior focussing•
k = scale factor
–
4/π = 1.27 for an
unclipped beam (k/D ≅
0.25)clear aperture
diameter
≅
2 * 1/e² beam
diameter
truncation loss approx. 0.03%–
1.41 (k/D ≅
0.21)
clear aperture
diameter
≅
1.5 * 1/e²
beam
diameter truncation loss approx. 1%
–
1.83 (k/D ≅
0.18)1/e² beam
diameter
= clear aperture
diameter, truncation loss
approx. 13.5%
DMkfλ 2•••
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 34
Focal diameter
-
Basics 2
•
fiber: NA = 0.14, f = 80 mm ⇒ D = 22.4 mm
•
BPP = M²*Lambda/Pi = NA * fiber core radius
•
e.g. fiber core radius
100 µm ⇒ M² ≅
41 (1.064nm)M² = beam quality factor
= 1 for a perfect Gaussian beam
> 1 for
real lasers
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 35
Focal diameter
(1/e²) -
Example
•
fiber: NA = 0.14, f = 80 mm ⇒ D = 22.4 mm•
fiber core diameter 200 µm
•
f-theta scan lens with
f = 160 mm
•
spot size:–
using
M²=41 (1.064nm) ⇒ 400 µm
–
ratio of focal lengths 160/80 = 2
X fibre core diameter ⇒ 400 µm
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 36
Focal diameter
(1/e²) -
Example
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 37
Focal diameter
-
Example
image width 500 µm image width 200 µmfor M²=1 (single mode fiber)aberration free spot 30 µm
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 38
GhostsGhosts!!
• unwanted back-reflections can destroy scan mirrorsor lens elements
• low M² values can result in diffraction limited ghosts
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 39
Color Color corrected lens corrected lens systemssystems
•
online inspection
•
different wavelengths in one system
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 40
Color corrected lens systems –
Beamexpander
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 41
Color corrected lens systems –
Fused silica focussing lens
spot @ 1,064 nm
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 42
Color corrected lens systems –
fused silica focussing lens
• ideal lens, i.e. no aberrations
• CCD lens with f=120 mm
• CCD 6.4 mm x 4.8 mm (½“)
• visible range
CCD
• fused silica focussing lens f=120mm
• diffracton limited @ 1,064 nm
• magnification –1 , i.e. FOV ½“
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 43
Color corrected lens systems –
fused silica focussing lens
original ups....
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 44
Color corrected lens systems –
the solution!
spot @ 1,064 nm
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 45
• lens system with a mix of lens materials• diffraction limited focus for 1,064 nm• very good image quality even for small CCD pixels (here 10 µm)
Color corrected lens systems –
the solution!
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 46
Color corrected lens systems –
f-theta lens
CCD objective
F-Theta objective
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 47
Color corrected lens systems –
f-theta lens
•color corrected for 532/1,064nm
•focal length 254 mm•dual AR
coating
•beam diameter 15 mm
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 48
Color corrected lens systems –
f-theta lens
originalcenter of scan field
LED illumination 532 nm +/- 10 nm
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 49
Color corrected lens systems –
f-theta lens
corner of scan field> small lateral color error
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 50
Color corrected lens systems –
f-theta lens
• lens system with a mix of lens materials• diffraction limited focus for 1,064 nm and 532 nm• LED bandwidth of 20 nm at 532 nm acceptable• very good image quality even for small CCD pixels (here 10 µm)
color correction pays off!
Optical Components for Laser Applications
Günter Toesko - Laserseminar BLZ im Dezember 2009 51
It is over nowIt is over now......