AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1 EQUIPMENT DATASHEET Tool ID SABRF01 OEM/Model NOVELLUS Sabre xT-200 Serial Number 01-40-CUXT0081 Process ECP Vintage June, 2002 Wafer Size 200 mm NOVELLUS – Sabre xT-200
NOVELLUS Sabre xT-200 - AG Semiconductor Semiconductor Services • [email protected] • 1 EQUIPMENT DATASHEET Tool ID SABRF01 OEM/Model NOVELLUS Sabre xT-200
May 28, 2018
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AG Semiconductor Services • [email protected] • www.agsemiconductor.com 1
EQUIPMENT DATASHEET
Tool ID SABRF01 OEM/Model NOVELLUS Sabre xT-200
Serial Number 01-40-CUXT0081 Process ECP
Vintage June, 2002 Wafer Size 200 mm
NOVELLUS – Sabre xT-200
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