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Cambridge University Press978-1-107-41200-2 - Materials Research Society Symposium Proceedings: Volume 705:Nanopatterning—From Ultralarge-Scale Integration to BiotechnologyEditors: Lhadi Merhari, Kenneth E. Gonsalves, Elizabeth A. Dobisz, Marie Angelopoulosand Daniel HerrFrontmatterMore information

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MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 705

Nanopatterning—FromUltralarge-Scale Integration

to BiotechnologySymposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.

EDITORS:

Lhadi MerhariCERAMEC

Limoges, France

Kenneth E. GonsalvesUniversity of North Carolina

Charlotte, North Carolina, U.S.A.

Elizabeth A. DobiszIBM Almaden Research Center

San Jose, California, U.S.A.

Marie AngelopoulosIBM T.J. Watson Research Center

Yorktown Heights, New York, U.S.A.

Daniel HerrSRC, Materials and Process Sciences

Research Triangle Park, North Carolina, U.S.A.

IMIRIS1Materials Research Society

Warrendale, Pennsylvania






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CONTENTS

Preface xi

Acknowledgments .xiii

Materials Research Society Symposium Proceedings xiv

ADVANCED MATERIALS ANDPROCESSES FOR NANOLITHOGRAPHY

* Novel Approaches to Nanopatterning: From SurfaceMonolayer Initiated Polymerization to HybridOrganometallic-Organic Bilayers 3

Clifford L. Henderson, Sean Barstow, Augustin Jeyakumar,Kendra McCoy, Dennis W. Hess, and Laren M. Tolbert

New Photoresists With Photoacid Generator in the Backbone 15Hengpeng Wu and Kenneth E. Gonsalves

* Resist Requirements for Electron Projection and Direct WriteNanolithography 23

Leonidas E. Ocola

* Chemically Amplified Resist Approaches for E-beamLithography Mask Fabrication 35

J.R. Maldonado, M. Angelopoulos, W. Huang, R.L. Brainard,J.M. Guevremont, and Z. Tan

* Polyoxometallate Containing Polymeric Materials forNanolithography and Molecular Devices 49

N. Glezos, P. Argitis, D. Velessiotis, P. Koutsolelos,CD. Diakoumakos, A. Tserepi, and K. Beltsios

* Nanoline Formation by Using Small-Aggregate Resist andSupercritical Resist Drying 61

Hideo Namatsu

* All C02-Processed Fluoropolymer-Containing PhotoresistSystems 73

Devin Flowers, Erik Hoggan, Joseph M. DeSimone, andRuben Carbonell

*Invited Paper






Designing Photoresist Systems for Microlithography in CarbonDioxide 81

Devin Flowers, Erik Hoggan, Joseph M. DeSimone, andRuben Carbonell

LITHOGRAPHIC AND NON-LITHOGRAPHICMETHODS OFNANOFABRICATION

* EUV Lithography: Patterning to the End of the Road 91Jonathan L. Cobb, Robert L. Brainard, Donna J. O'Connell,and Paul M. Dentinger

Plasmon Printing—A New Approach to Near-FieldLithography 101

Pieter G. Kik, Stefan A. Maier, and Harry A. Atwater

Effects of Mask Materials on Near Field OpticalNanolithography 107

Sharee J. McNab and Richard J. Blaikie

Nanoscale Electrochemical Deposition of Metals on FIBSensitized p-Type Silicon 113

Adrian Spiegel, M. Dobeli, and Patrik Schmuki

Nanoscale Pattern Transfer Using Sputter-InducedCorrugations Formed at the Si/SiO2 Interface 119

Cary G. Allen, Matthew Daniels, Christopher C. Umbach,and Jack M. Blakely

Formation and Conductive Properties of MiniaturizedFullerite Sensors 125

Alexander S. Berdinsky, Dietmar Fink, Alexander V. Petrov,Manfred Miiller, Lewis T. Chadderton, Jose F. Chubaci, andManfredo H. Tabacniks

Formation of Al Nanodot Array by the Combination ofNano-Indentation and Anodic Oxidation 133

S. Shingubara, Y. Murakami, K. Morimoto, H. Sakaue, andT. Takahagi

Patterning 2D Metallic Surfaces by Soft Lithography 139M. Toprak, D.K. Kim, M. Mikhailova, and M. Muhammed

*Invited Paper

VI






Planar Molecular and Macromolecular Gradients:Preparation and Properties 145

J. Genzer, T. Wu, and K. Efimenko

Electric Field Induced Patterning of Polymer Films 151David G. Bucknall and G. Andrew D. Briggs

SYNTHESIS, FUNCTIONALIZATIONANDORDERING OFNANOSTRUCTURES

* Surface Functionalization of Ceramic Nanoparticles:Application to Ion-Sensing and Gas-Sensing Devices 159

Marie-Isabelle Baraton

Stable Adsorption of Lipid Vesicles on Modified Gold Surfaces 171Stavroula Sofou and James L. Thomas

* Towards the Use of Biologically Inspired Techniques for theAssembly of Electronic Devices 177

H. McNally, M. Pingle, S.W. Lee, D. Guo, D. Bergstrom, andR. Bashir

Scanning Tunneling Microscopy Observation of SingleDangling Bonds on the Si(100)2xl:H Surface 187

Lequn Liu, Jixin Yu, and Joseph W. Lyding

AFM Studies of Fracture Surfaces of Composition B EnergeticMaterials 193

Y.D. Lanzerotti and J. Sharma

Preferential Adhesion of Gold Nanoparticles UsingLithographically Patterned Substrates 199

Johan Pihl, Mohammad S. Kabir, and S.H. Magnus Persson

Building Two and Three-Dimensional Structures of ColloidalParticles on Surfaces Using Optical Tweezers and CriticalPoint Drying 205

Dirk L. J. Vossen, Jacob P. Hoogenboom, Karin Overgaag,and Alfons van Blaaderen

Ordering Effect of Lithium Ions in a Self-Assembled HybridSystem 211

PJ. Retuert, S. Fuentes, G. Gonzalez, and M. Yazdani-Pedram

* Invited Paper

vii






Effect of Al Concentration on Growth of Antiphase Domains in Ti3Al 217Y. Koizumi, H. Katsumura, Y. Minamino, and N. Tsuji

Polymeric Nanoscale All-Solid State Battery 223Steven E. Bullock and Peter Kofinas

Charge Transport in Mesoscopic Carbon Network Structures 227V. Ksenevich, J. Galibert, V. Samuilov, Y.-S. Seo, J. Sokolov,and M. Rafailovich

NANOSTRUCTURES AND NANOFABRICA TIONFOR BIOLOGICAL APPLICATIONS

* Nanometric Surface Patterns for Tissue Engineering:Fabrication and Biocompatibility In Vitro 237

M. Riehle, M. Dalby, H. Johnstone, J. Gallagher, M.A. Wood,B. Casey, K. McGhee, S. Affrossman, C.D.W. Wilkinson, andA.S.G. Curtis

A Versatile Approach for Biomaterial Patterning: Masked IonBeam Lithography 247

Kenneth E. Gonsalves, Wei He, David B. Poker, Nikola Batina,and Lhadi Merhari

The Development of Surface Roughness and Implications forCellular Attachment in Biomedical Applications 253

Bruce Banks, Sharon Miller, Kim de Groh, Amy Chan, andMandeep Sahota

Micro- and Nanofabricating Lipid Patterns Using a Polymer-BasedWet Lift-Off 259

Reid N. Orth, Ismail Hafez, Min Wu, Bojan Ilic,Barbara Baird, Theodore G. Clark, and Harold G. Craighead

Patterned Nanoparticle Assembly as Novel Chemical andBiological Platforms 265

M.M. Maye, J. Luo, L. Han, N. Kariuki, F.X. Zhang, and CJ. Zhong

Nanofabrication at Biologically Important Length Scale:Etching of Dislocation Array in Twist-Bonded Bicrystals 271

Fang Mei, Martin J. Murtagh, Stephen L. Sass, Rikard A. Wind,Yu Wang, and Melissa A. Hines

* Invited Paper

Vlll






FABRIC A TION OF ORDEREDMAGNETIC NANOSTRUCTURES

* Resistless Patterning of Magnetic Storage Media Using IonProjection Structuring 279

A. Dietzel, R. Berger, H. Grimm, C. Schug, W.H. Bruenger,C. Dzionk, F. Letzkus, R. Springer, H. Loeschner,E. Platzgummer, G. Stengl, S. Anders, Z.Z. Bandic,C.T. Rettner, B.D. Terris, H. Eichhorn, M. Boehm, andD. Adam

* Large Scale Periodic Magnetic Nanostructures Fabricated byOptical Interference Lithography 291

A. Carl, S. Kirsch, and E.F. Wassermann

* Magnetic Interactions in Fe Nanoparticle Arrays 303D. Farrell, S. Yamamuro, Yumi Ijiri, and S.A. Majetich

Self-Assembled Structures of Gas-Phase Prepared FePtNanoparticies 315

Bernd Rellinghaus, Sonja Stappert, Mehmet Acet, andEberhard F. Wassermann

* High Density Hexagonal Nickel Nanowire Arrays with 65 andlOOnm-Period 327

Kornelius Nielsch, Ralf B. Wehrspohn, Saskia F. Fischer,Helmut Kronmiiller, Jochen Barthel, Jurgen Kirschner,Thomas Schweinbock, Dieter Weiss, and Ulrich Gosele

Author Index .....333

Subject Index 337

* Invited Paper

IX











PREFACE

Nanotechnology is regarded as the key technology of the 21 st century and is expected tobring a solution to problems in areas ranging from information technology to biotechnology.Whether via lithographic or non-lithographic methods, nanopatterning is a major issue toaddress as it is the enabling technique for the fabrication of nanostructures. A high level ofcreativity is clearly needed to engineer new resists and masks, to optimize nanomaterialssynthesis and processing...etc....in other words to make the transition from micro- tonanoscale possible while keeping the costs of future nanofabrication compatible with themarket requirements.

This volume is a snapshot of the state-of-the-art of nanofabrication applied to circuitintegration and cell engineering, and provides the reader with indication of the future trendsand remaining challenges in this technologically important field. It contains a representativepart of the papers that were presented during Symposium Y, "Nanopatterning—FromUltralarge-Scale Integration to Biotechnology," held November 25-29 at the 2001 MRS FallMeeting in Boston, Massachusetts.

The large attendance at the tutorial and at the 4-day long symposium again demonstratedintense interest in the topic of nanofabrication by the materials science community. Thechallenge to gather, in a single forum, researchers working in apparently non-related fields suchas cell engineering, microelectronics, magnetism, surface science and new materials synthesiswas successfully taken up.

In the field of advanced materials and processes for nanolithography, it was shown, forinstance, that hybrid nanocomposite resists offer a promising route to sub-lOOnm resolutionstructures while CO2-processing of resist systems solves the serious problem of nanostructurescollapse. Performance of ion projection lithography and progress of EUV and near-fieldoptical lithographies for sub-lOOnm resolution circuits were critically assessed.

Nanofabrication for biological applications was particularly well addressed by outstandingcontributions from key players, indicating a fast evolving field where nanopatterning ofsubstrates, for example, plays a major role in cell engineering.

Fabrication of ordered nanostructures is an emerging field that already showed greatpromises in photonics and data storage. Here, the topic of high density magnetic data storagefocuses on original fabrication methods by lithography and self-assembly of periodic structureson surfaces whose sizes are compatible with industrial applications.

Lhadi MerhariKenneth E. GonsalvesElizabeth A. DobiszMarie AngelopoulosDaniel Herr

February 2002











ACKNOWLEDGMENTS

The editors wish to thank the contributors to this volume and all of the symposium chairswho directed and guided the discussions. Timely and conscientious efforts of the manuscriptreviewers are greatly appreciated.

The organizers of the symposium are grateful for the generous support providedby the following organizations:

CERAMEC FranceMotorola France, Research CenterNanoresist Technologies, Inc.National Science FoundationThe Whitaker Foundation

Lhadi Merhari would like to dedicate this book to the memory of his beloved motherEleonora who died shortly before the MRS Meeting.






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 664— Amorphous and Heterogeneous Silicon-Based Films—2001, M. Stutzmann, J.B. Boyce,J.D. Cohen, R.W. Collins, J. Hanna, 2001, ISBN: 1-55899-600-1

Volume 665— Electronic, Optical and Optoelectronic Polymers and Oligomers, G.E. Jabbour, B. Meijer,N.S. Sariciftci, T.M. Swager, 2002, ISBN: 1-55899-601-X

Volume 666— Transport and Microstructural Phenomena in Oxide Electronics, D.S. Ginley, M.E. Hawley,D.C. Paine, D.H. Blank, S.K. Streiffer, 2001, ISBN: 1-55899-602-8

Volume 667— Luminescence and Luminescent Materials, K.C. Mishra, J. McKittrick, B. DiBartolo,A. Srivastava, P.C. Schmidt, 2001, ISBN: 1-55899-603-6

Volume 668— II-VI Compound Semiconductor Photovoltaic Materials, R. Noufi, R.W. Birkmire, D. Lincot,H.W. Schock, 2001, ISBN: 1-55899-604-4

Volume 669— Si Front-End Processing—Physics and Technology of Dopant-Defect Interactions III, M.A. Foad,J. Matsuo, P. Stolk, M.D. Giles, K.S. Jones, 2001, ISBN: 1-55899-605-2

Volume 670— Gate Stack and Silicide Issues in Silicon Processing II, S.A. Campbell, C.C. Hobbs, L. Clevenger,P. Griffin, 2002, ISBN: 1-55899-606-0

Volume 671— Chemical-Mechanical Polishing 2001—Advances and Future Challenges, S.V. Babu, K.C. Cadien,J.G. Ryan, H. Yano, 2001, ISBN: 1-55899-607-9

Volume 672— Mechanisms of Surface and Microstrucure Evolution in Deposited Films and Film Structures,J. Sanchez, Jr., J.G. Amar, R. Murty, G. Gilmer, 2001, ISBN: 1-55899-608-7

Volume 673— Dislocations and Deformation Mechanisms in Thin Films and Small Structures, O. Kraft,K. Schwarz, S.P. Baker, B. Freund, R. Hull, 2001, ISBN: 1-55899-609-5

Volume 674— Applications of Ferromagnetic and Optical Materials, Storage and Magnetoelectronics, W.C. Black,HJ. Borg, K. Bussmann, L. Hesselink, S.A. Majetich, E.S. Murdock, B.J.H. Stadler, M. Vazquez,M. Wuttig, J.Q. Xiao, 2001, ISBN: 1-55899-610-9

Volume 675— Nanotubes, Fullerenes, Nanostructured and Disordered Carbon, J. Robertson, T.A. Friedmann,D.B. Geohegan, D.E. Luzzi, R.S. Ruoff, 2001, ISBN: 1-55899-611-7

Volume 676— Synthesis, Functional Properties and Applications of Nanostructures, H.W. Hahn, D.L. Feldheim,C.P. Kubiak, R. Tannenbaum, R.W. Siegel, 2002, ISBN: 1-55899-612-5

Volume 677— Advances in Materials Theory and Modeling—Bridging Over Multiple-Length and Time Scales,L. Colombo, V. Bulatov, F. Cleri, L. Lewis, N. Mousseau, 2001, ISBN: 1-55899-613-3

Volume 678— Applications of Synchrotron Radiation Techniques to Materials Science VI, P.G. Allen, S.M. Mini,D.L. Perry, S.R. Stock, 2001, ISBN: 1-55899-614-1

Volume 679E—Molecular and Biomolecular Electronics, A. Christou, E.A. Chandross, W.M. Tolles, S. Tolbert,2001, ISBN: 1-55899-615-X

Volume 680E—Wide-Bandgap Electronics, T.E. Kazior, P. Parikh, C. Nguyen, E.T. Yu, 2001,ISBN: 1-55899-616-8

Volume 68IE—Wafer Bonding and Thinning Techniques for Materials Integration, T.E. Haynes, U.M. Gosele,M. Nastasi, T. Yonehara, 2001, ISBN: 1-55899-617-6

Volume 682E—Microelectronics and Microsystems Packaging, J.C. Boudreaux, R.H. Dauskardt, H.R. Last,F.P. McCluskey, 2001, ISBN: 1-55899-618-4

Volume 683E—Material Instabilities and Patterning in Metals, H.M. Zbib, G.H. Campbell, M. Victoria,D.A. Hughes, L.E. Levine, 2001, ISBN: 1-55899-619-2

Volume 684E—Impacting Society Through Materials Science and Engineering Education, L. Broadbelt,K. Constant, S. Gleixner, 2001, ISBN: 1-55899-620-6

Volume 685E—Advanced Materials and Devices for Large-Area Electronics, J.S. Im, J.H. Werner, S. Uchikoga,T.E. Felter, T.T. Voutsas, HJ. Kim, 2001, ISBN: 1-55899-621-4

Volume 686— Materials Issues in Novel Si-Based Technology, W. En, E.C. Jones, J.C. Sturm, S. Tiwari,M. Hirose, M. Chan, 2002, ISBN: 1-55899-622-2

Volume 687— Materials Science of Microelectromechanical Systems (MEMS) Devices IV, A.A. Ayon,S.M. Spearing, T. Buchheit, H. Kahn, 2002, ISBN: 1-55899-623-0

Volume 688— Ferroelectric Thin Films X, S.R. Gilbert, Y. Miyasaka, D. Wouters, S. Trolier-McKinstry,S.K. Streiffer, 2002, ISBN: 1-55899-624-9






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 689— Materials for High-Temperature Superconductor Technologies, M.P. Paranthaman, M.W. Rupich,K. Salama, J. Mannhart, T. Hasegawa, 2002, ISBN: 1-55899-625-7

Volume 690— Spintronics, TJ. Klemmer, J.Z. Sun, A. Fert, J. Bass, 2002, ISBN: 1-55899-626-5Volume 691— Thermoelectric Materials 2001—Research and Applications, G.S. Nolas, D.C. Johnson,

D.G. Mandrus, 2002, ISBN: 1-55899-627-3Volume 692— Progress in Semiconductor Materials for Optoelectronic Applications, E.D. Jones, M.O. Manasreh,

K.D. Choquette, D. Friedman, 2002, ISBN: 1-55899-628-1Volume 693— GaN and Related Alloys—2001, J.E. Northrup, J. Neugebauer, S.F. Chichibu, D.C. Look,

H. Riechert, 2002, ISBN: 1-55899-629-XVolume 695— Thin Films: Stresses and Mechanical Properties IX, C.S. Ozkan, R.C. Cammarata, L.B. Freund,

H. Gao, 2002, ISBN: 1-55899-631-1Volume 696— Current Issues in Heteroepitaxial Growth—Stress Relaxation and Self Assembly, E. Stach,

E. Chason, R. Hull, S. Bader, 2002, ISBN: 1-55899-632-XVolume 697— Surface Engineering 2001—Fundamentals and Applications, WJ. Meng, A. Kumar, Y-W. Chung,

G.L. Doll, Y-T. Cheng, S. Veprek, 2002, ISBN: 1-55899-633-8Volume 698— Electroactive Polymers and Rapid Prototyping, Y. Bar-Cohen, D.B. Chrisey, Q.M. Zhang,

S. Bauer, E. Fukada, S.C. Danforth, 2002, ISBN: 1-55899-634-6Volume 699— Electrically Based Microstructural Characterization III, R.A. Gerhardt, A. Washabaugh, M.A. Alim,

G.M. Choi, 2002, ISBN: 1-55899-635-4Volume 700— Combinatorial and Artificial Intelligence Methods in Materials Science, I. Takeuchi, C. Buelens,

H. Koinuma, E.J. Amis, J.M. Newsam, L.T. Wille, 2002, ISBN: 1-55899-636-2Volume 702— Advanced Fibers, Plastics, Laminates and Composites, F.T. Wallenberger, N. Weston, K. Chawla,

R. Ford, R.P. Wool, 2002, ISBN: 1-55899-638-9Volume 703— Nanophase and Nanocomposite Materials IV, S. Komarneni, R.A. Vaia, G.Q. Lu, J-I. Matsushita,

J.C. Parker, 2002, ISBN: 1-55899-639-7Volume 704— Nanoparticle Materials, R.K. Singh, R. Partch, M. Muhammed, M. Senna, H. Hofmann, 2002,

ISBN: 1-55899-640-0Volume 705— Nanopatterning—From Ultralarge-Scale Integration to Biotechnology, L. Merhari, K.E. Gonsalves,

E.A. Dobisz, M. Angelopoulos, D. Herr, 2002, ISBN: 1-55899-641-9Volume 706— Making Functional Materials with Nanotubes, P. Nikolaev, P. Bernier, P. Ajayan, Y. Iwasa, 2002,

ISBN: 1-55899-642-7Volume 707— Self-Assembly Processes in Materials, S. Moss, 2002, ISBN: 1-55899-643-5Volume 708— Organic and Optoelectronic Materials, Processing and Devices, S. Moss, 2002,

ISBN: 1-55899-644-3Volume 709— Advances in Liquid Crystalline Materials and Technologies, P.T. Mather, D.J. Broer, T.J. Bunning,

D.M. Walba, R. Zentel, 2002, ISBN: 1-55899-645-1Volume 710— Polymer Interfaces and Thin Films, C.W. Frank, 2002, ISBN: 1-55899-646-XVolume 711— Advanced Biomaterials—Characterization, Tissue Engineering and Complexity, 2002,

ISBN: 1-55899-647-8Volume 712— Materials Issues in Art and Archaeology VI, P.B. Vandiver, M. Goodway, J.R. Druzik, J.L. Mass,

2002, ISBN: 1-55899-648-6Volume 713— Scientific Basis for Nuclear Waste Management XXV, B.P. McGrail, G.A. Cragnolino, 2002,

ISBN: 1-55899-649-4Volume 714E—Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II,

S. Lahiri, 2002, ISBN: 1-55899-650-8

Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society






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