Multidisciplinary Engineering Senior Design 06421 Automated Plasma Generator Test System Preliminary Design Review 11/11/05 Project Sponsor: MKS, ENI Incorporated.

Multidisciplinary Engineering Senior Design06421 Automated Plasma Generator Test System Preliminary Design Review11/11/05

Project Sponsor:MKS, ENI Incorporated

Team Members:John Dullea

Christine KussMegan Suflita

Team Mentor:Dr. Ferat Sahin

Acknowledgements:Dr. Paul Steibitz, Advisor

Kate Gleason College of EngineeringRochester Institute of Technology

Project Background

Narrow band HF RF amplifier Parallel devices with controller Subcomponents of 3700 Watt

amplifier

Current Situation

Tedious to test Time consuming Resource consuming Interpolation issues Result analysis is time consuming

Software Capabilities

LabVIEW code Collect necessary data Perform calculations Generate graphs Fully automated

Required tests

Needs Assessment Customer’s Needs

Automated in LabVIEW Graphical User Interface will be provided Ability to vary input parameters Ability to perform safety checks and take measurements Potential for destructive testing

Our Needs Access to MKS facility, equipment, and technical support Defined work area at MKS Results of past tests for comparison

Concept Development Option 1

Signal Generator

Variable DC Supply

Coupler Load Simulator

Spectrum Analyzer Oscilloscope

Amplifier UUT

HP 4418B Power Meter

Bird Power Meter Sensor

Coupler

Power Meter

Concept Development Option 2

Control BoardGenerator Driver

Amplifier

Generator PSV

UUT Generator CouplerPC Pin Pout Load Simulator

Project ScheduleID Task Nam e Durati on

1 Obtain/Write driv ers for giv en hardw are 17 days

2 Obtain dri vers needed to begin wri ti ng l oops 10 days

3 Obtain/Write other dri vers 10 days

4 Code Loops in LabVIEW 22 days

5 Input Dri ve 7 days

6 Rai l Voltage 7 days

7 Load Impedance 7 days

8 Frequency 7 days

9 Fail S afe 43 days

10 File Input 10 days

11 File Input GUI 28 days

12 File Output 7 days

13 Data Collection 30 days

14 Correlation S tudy 17 days

15 Data Processing 17 days

16 Debug 32 days

17 Documentation 59 days

18 Users' Manual 10 days

19 Rev iew of Code Comments 10 days

20 Input Dri ve 4 days

21 Rai l Voltage 4 days

22 Load Impedance 4 days

23 Frequency 4 days

24 Meeting Notes 59 days

25 Websi te 5 days

26 Presentati on 10 days

All

All

JD

MS

CK

CK

JD

JD

MS

CK

All

All

All

All

All

CK/MS

CK/JD

JD/MS

JD/MS

CK

MS

All

11/13 11/20 11/27 12/4 12/11 12/18 12/25 1/1 1/8 1/15 1/22 1/29 2/5 2/12 2/19 2/26 3/5 3/12 3/19

Key Requirements & Critical Parameters

Repeatable Data Safety Checks Fully Automated

Overall System Diagram/Block Diagram Software flow of

overall LabVIEW program. Contains 4 nested

loops Varies all

necessary input parameters

Frequency Impedance Voltage Amplitude

File Input

Frequency

Impedance

Voltage

Amplitude

Analysis & Synthesis of Design

Project based upon generic platform Easily adaptable for future

considerations Easily interchangeable with similar

units Customer specifications met Integration of existing code

BOM & Costs All equipment provided by MKS Equipment list

Tektronix Digital Scope Bird Power Meter Bird Power Sensor Agilent Power Meter Agilent Power Sensor ENI Load Simulator & RS232 Cable ENI Matchwork Controller ENI Fiber Optic Converter Agilent Spectrum Analyzer Dell PC Agilent Signal Generator Keithey Scanning Card 4 RF Cables, DC Power Cable, & 6 GPIB Cables Power Supply

Anticipated Design Challenges/Risk

Difficulty integrating software blocks

Creating user-friendly interface that is easily interpreted

UUT safety and control systems Stability of amplifier signal Debugging of code

SD II Project Plan

Automated Tests Correlation Study Corrective Actions MKS onsite verifications

Deliverables

LabVIEW code User manual On site training

Questions

Smith Chart

http://www.web-ee.com/primers/files/SmithCharts/smith_charts.htm

Input Parameters

User input state:Input fields will be displayed for user

Did user save file with unique

name?

File name state:User will select the input file to test the

unit

Did user select a file?

Display parameters:

Display input file parameters for

user

Are these parameters

acceptable to the user?

Pre-Test:Parse input file into format for

LabVIEW processing

YES

NODEFAULT

ENTRANCE

TO TEST STRUCTURE

NONO

YESYES

Signal Generator Frequency Flow

Read and compare input

frequency

Is frequency in range?

Set signal generator frequency

Is there an output

amplitude present?

Set signal generator amplitude

FROM FILE INPUT NO

YES

NO

YES

GO TO LOAD SIMULATOR STATE

Communications with Load Simulator

Call load simulator software

Has load simulator data

been recorded?

Wait and scan for software to complete

FROM SIG GEN FREQUENCY

NO

YES

GO TO POWER SUPPLY

Power Supply Handling

Read and compare voltage and current level

Are levels in acceptable

ranges

Set power supply voltage and

current

Did output settle?

Wait until output settles

FROM FILE INPUT AND LOAD SIMULATOR

NO

YES

NO

YES

GO TO LOAD SIMULATOR STATE

Determine safe level to cut back to and set variables

Signal Generator Amplitude Handling

Read and compare input

amplitude

Is amplitude in range?

Set signal generator amplitude

FROM FILE INPUT AND POWER SUPPLY

NO

YES

GO TO LOAD SIMULATOR STATE

Cost – Benefit Analysis Assumptions

For manual testing a technician requires 3 days for completion

Technician gets paid $15/hour. Automated program can complete task in 24 hours with 1

hour set up. ($15)*(8hrs/day)*(3 days) = $360 ($15)*(1hr) = $15 A cost difference of $345 per test 3 tests * $360 = $1080 3 tests can be completed with the automatic test

system in the same time that 1 test can be completed manually