MicroE Systems mercury ii product presentation

GSI Group Inc. CONFIDENTIAL

Mercury II™

Encoders

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Mercury II Encoder Family

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Model Resolution Output Top Speed ScalesMII6000 5µm – 1.2nm Quadrature or Serial Word 10m/s Tape, Linear Glass, Rotary Glass MII5000 5µm – 1.2nm Quadrature or Serial Word 10m/s Tape, Linear Glass, Rotary GlassMII1900 5µm – 1.2nm* Analog 7.2m/s Tape, Linear GlassMII1600 5µm – 0.5µm Quadrature 20m/s** Tape

* Dependent on customer’s electronics ** At x4 interpolation only



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Mercury II Encoder Family Common Features

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•Dual Laser optical configuration–Laser 1 = Main track

–Laser 2 = Index track

•Metal tape scale capability

•Stick-on index

•Stick-on left and right limits (except MII1600/1900)

•Double shielded cable

•Standard 15 pin D-Sub connectors

•Automatic Gain Control (AGC)

•Broad alignment tolerances

•CE and RoHS Compliant



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MII1600• Digital in the head, A-quad-B• 20µm pitch Metal tape scale• Factory set 0.5µm, 1µm, 2.5µm or

5µm resolution and repeatability• Index Window is ~20µm wide• Outputs are all differential• Single ended Sin/Cos signals for

alignment verification • No electronics in the DB15

connector • Same pin-map as Renishaw

RGH24• Standard ½, 1, 3 and 5 meter

cable lengths

MII1600L with single ended limits currently under development

Index Window

A, B

Sin/Cos(alignment)



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MII1900

Index Window

Sin/Cos

• Analog Sin and Cos• 20µm pitch metal tape or glass

scale• Excellent signal to noise ratio

allows interpolation up to 14 bits (x16,384) with customer gain, offset and phase corrections

• Index Window is ~20µm wide• Outputs are all differential • No electronics in the DB15

connector • Standard ½, 1, 3 and 5 meter

cable lengths

MII1900L with single ended limits currently under development



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MII1900/1600 Product Overview

• Customizable– Cable length up to 10 meters– Alternate pin maps– Alternate connector– Custom housing (high volume OEM)

• Easy to align– Optional alignment tool– Optional software– Oscilloscope

• Optional marker tape scale with laser written index marks



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MII1900/1600 Alignment Tools

• Alignment tool kit– Computer Interface Adaptor, Alignment Tool, 9V Power Supply– Recommended for setup (red/yellow/green LEDs)– Separate models for MII1900 vs. MII1600, S vs. H connectors– Can be customized for alternate pin maps and connectors– Does not support servo control – no pass-through

• SmartPrecision II Software– Works with Alignment Tool and Computer Interface Adapter– Priced separately (CD + RS232 interface cable)



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MII1600/1900 Qualification TestingExtensive design validation and qualification testing performed

Test SpecEMI immunity EN61000-4-3, -4, -5, -6

ESD compliance EN61000-4-2

Mechanical vibration 30G @ 17Hz

Mechanical Shock 300G, 0.5 ms half sine

Thermal shock and cycling 0°C to 70°C

Accuracy See Datasheet

Resolution See Datasheet

Output signal noise MII 1600: 1μm peak-to-peak @5kHzMII 1900: 5nm RMS at 5kHz bandwidth

Speed 7.2 M/s

Repeatability MII 1600: +/- 1 LSBMII 1900: +/- 5nm (@ 4000x)

Contamination resistance Less than 50% signal drop

Supply voltage variances 4.75V to 5.25V

Highly Accelerated Life Testing 1000 hours 85/85

Operating environment 10% to 90% RH non-condensing



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MII1900 Long Range Accuracy



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MII1900 Short Range Accuracy



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Mercury II 5000

Mercury II 5000 ModelsModel Resolution

Mercury II 5800 5µm – 1.2nm(x4 – x16,384)

Mercury II 5700 5µm – 5nm(x4 – x4000)

Mercury II 5500 5µm – 50nm(x4 – x400)



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Mercury II 5000

1 LSB• A-quad-B output with 1LSB index and limits; tri-state alarm for low / high signal

• High speed serial word available • High speed

– Up to 10m/s @ 0.2µm– Up to 5m/s @ 0.1µm

• User-programmable resolution from 5µm to 1.2nm

• All electronics in the sensor, including interpolation up to x16384

• AGC for resistance to scale contamination and long term stability



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Mercury II 5000

• Many programmable features– Resolution– Quadrature output frequency– Low-pass filter frequency– Limit polarity– Serial word format

• 1m or 5m double-shielded sensor cable; 12 conductors

• All outputs are differential• Pin map matches Renishaw RGH24• Required Alignment Tool:

– Pushbutton setup process– Setup LED’s– Built-in SmartPrecision II Software– Ethernet software interface– 5V Power supply– Not for use while in servo control

(signals do not pass through) ELECTROMATEToll Free Phone (877) SERVO98


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MII5000 Customization

• Alternate connector or pin map• Cable lengths, up to 10m• Custom serial word interface may require NRE

charge. (ex: Panasonic controller)• ULE glass scales (ultra low expansion; CTE = 0)• Linear scale with embedded chrome index and

limits (ex: 303-00189)

• Custom rotary or rotary segment gratings• ETC. MicroE, as always, is willing to consider any

reasonable business opportunity

303-00189



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MII5000 Unique Selling Points

Only digital-from-the-sensor encoder with all of these features:

• Integral dual limits• Stick-on index• Up to 1.2nm resolution• 11mm sensor Z height• Programmable resolution• Option for high speed serial word output• Broadest alignment tolerances of any 20μm

encoder system• Fastest encoder available with 0.1μm digital

output (5m/s)



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MII5000 Qualification Testing

Extensive design validation and qualification testing performed

Test SpecEMI immunity EN61000-4-3, -4, -5, -6

ESD compliance EN61000-4-2

Mechanical shock 300G 0.5 ms half sine

Mechanical vibration 30G @ 17Hz

Thermal shock and cycling 0°C to 70°CAccuracy See Datasheet

Resolution See Datasheet

Output signal noise 30nm peak to peak @ full bandwidth

Speed 5 meters/second

Repeatability +/- 1 LSB maximum

Highly Accelerated Life Testing 1000 hours 85/85

Supply voltage variances 5V +/- 0.25V

Operating environment 10% to 90% RH non-condensing ELECTROMATEToll Free Phone (877) SERVO98


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MII5000 Short Range Accuracy On Tape



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MII5000 Short Range Accuracy On Glass



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MII5000 Long Range Accuracy On Tape

After two-point linear correction



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MII5000 Long Range Accuracy On Glass



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MII6000

• Repackaging of the MII5000 product• All the same features as the MII5000 but

with some external electronics• Significantly smaller read head• Power dissipation in the head reduced 72%• LED indicators in the connector

– Signal Strength (red, yellow, green and purple)

– Index (green)

– Left Limit (blue)

– Right Limit (red)

• MII6000V vacuum version



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MII4000

• Grandfather of Mercury II• Forerunner to the MII5000 product• All the same features as the

MII5000 but with external electronics

• Built-in LED signal strength indicators

• Built-in calibration push button• No alignment tool• Connects directly to Ethernet for

access to SmartPrecision II software



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Metal Tape Scales

• Inconel 625 substrate (CTE: 12-15ppm/ºC)

• Laser written pattern – Main track– Dark region– Reference track (laser written or stick-on)

• Index• Left limit• Right limit

• Peel-and-stick adhesive backing• Protective blue film• Installation tool• ±30µm/m long range accuracy before linearization

Non-reflective reference track available soon– Improved contamination resistance– Reduces the incidence of false index or limits– Requires customized MII1900 or MII1600– Laser written index and limits only (no stick-on markers)



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Linear Glass Scales

• 2.5mm thick B270 float glass substrate (CTE: 8-9ppm/ºC)

• Chrome deposition pattern• Gratings all cut to length in-house

– ≤130mm cut from 303-00159– 130mm < x ≤

1000mm cut from 303-00166• Model #: MIILXXX (XXX= total length in mm)

• Part #: 303-00159-XXX or 303-00166-XXX (XXX= total length in mm)

• Long range accuracy– Short: ±1.5µm standard, ±1.0µm high accuracy grade– Long: ±5.0µm standard, ±2.0µm high accuracy grade

• Custom scales available with chrome index and limits• Custom substrates available: Quartz, ULE, etc.

303-00159

303-00166



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Rotary Glass Scales

• 2.5mm thick B270 float glass substrate (CTE: 8-9ppm/ºC)

• Chrome deposition pattern• Three standard models

– MIIR4513-HI (pn: 190-00102)

– MIIR6425-HJ (pn: 190-00103)

– MIIR12151-HK (pn: 190-00104)

• Available without hubs

190-00102 190-00103 190-00104



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Coming Soon!! MII1900L and MII1600L

• Same as MII1900/1600 but with single ended left and right limits– Microprocessor controlled– Calibration required

• USB based alignment tool and software– Power the tool and encoder from the USB port



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MicroE Systems mercury ii product presentation

Technology

electromatetoll free

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development toll free

linear glass

nm rms

repeatability index

nm x4 x16