MicroE Systems 2011 Catalog

8/3/2019 MicroE Systems 2011 Catalog

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High Performance Encoder

M i c r o E

S y s t e m

s

HIGHER PERFORMANCE

SMALLER

FASTER

EASIER

SMARTER

MORE VERSATILE

CUSTOMIZATION



Innovative Encoder Systems that Deliver Performanceand ValueSuperior performance. World-class reliability. Responsive support

and delivery. Focusing on what customers want most is why MicroE

Systems is growing so quickly and introducing new products faster

than any other encoder company. With a growing product

line of over 30 models to match your specific

application requirements, and direct sales and

distributor offices in 13 countries, we give

you a world of encoder solutions.

MicroE Systems’ Technology:

Creating the Best Encoders It takes a powerful combination of an advanced optical system,

signal processing technology, and state of the art optoelectronic

integration to make industry-leading encoders. And that’s just w

MicroE Systems has done, achieving many industry firsts:

• First 1.2nm resolution encoder with all electronics in the sens

• First 20µm encoder with cyclical error of only ±20nm

• First PC Board-mount encoder with 78nm resolution

• First sub-micron encoder with ±2° setup tolerance

• First encoder with one sensor for tape or glass, linear or rotar

• First encoder with user-programmable settings and software • First stick-on index and limits

PurePrecision ™ OpticsGives Mercury theSensor Size Advantage

MicroE Systems’ patentedsensor creates a high-fidelitysignal with very compactoptics. The result is aminiature, high-performancesensor that’s just 8.4mm tall,

weighing only 5 grams.

PurePrecision ™ Optics –Faster Setup, Bet ter Accuracy

Our PurePrecision optical layout gives our

sensors the widest alignment tolerances

in the industry: ±150µm in the Z axis and

±2° for theta Z. That’s 300% better than

competing encoders, and that means

faster setup and better long-term motion

system reliability. High signal quality

means better accuracy – cyclical error

as low as ±20nm and interpolation that

Product Range

Incremental Encoders forAll Applications

Mercur y II ™

Tape scales or glassscales for a wide range ofapplications. Linear orrotary. Resolutions from5µm to 1.2nm.

Incremental Encoders forCompact Motion Systems

Mer cur y ™ and Chi pEncoder ™

Screw mount or PC boardmount. Linear or rotary.Resolutions from 10µm

to 5nm. Atmosphericor vacuum.

Data Storage

Ultra-high performanceencoders, positioners,and servo control forData Storage applications.

Packaged Encoders

DRC ™

Housed rotary encoderswith bearings. Rugged andreliable. Resolutions from400 to 360,000 CPR.

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Pages 12-14

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About MicroE SystemsEncoder Innovation Star ts Here

MicroE Systems, a division of GSI Group, was founded in 1994 to

advance encoder technology. Seizing the trend toward smaller

motion systems, our patented optical designs have led to over 30

different encoder models today. These innovations make encodersthat achieve higher accuracy and speed while also being smaller,

easier to install, and use less power. That’s why so many OEM’s

are putting our encoders in their designs.

Due to robust sales growth, we have made extensive investments

in our manufacturing operations: a new, larger facility in 2008; use

of lean manufacturing and six-sigma principles to achieve rapid

response to customer orders while achieving superior quality; tight

controls on cleanliness and ESD on the shop floor; and the training

and quality systems to be ISO9001:2008 certified.

Focus on Technology and New ProductsMicroE Systems builds

encoders and servotrack

writing subsystems for one

of the world’s most leading

edge industries: Data

Storage. In fact, most hard

disk drives manufactured

throughout the world today

are made using MicroE Systems’ technology. Plus, we build the most

widely used encoders for sub-micron compact motion systems -

Mercury™ encoders. Add to that our growing range of Mercury II™

encoders and tape scale solutions. These successes stem fromour ongoing R&D commitment to create more accurate, faster,

smaller encoders.

Best Performance and Value

MicroE Systems’ encoders

are renowned for their

small size, ease of setup

and features. But more

customers are also

discovering their world-

class performance – lower

cyclical error for bettervelocity control, accuracy to ±1µm, and resolution that’s stable up to

1.2nm. All of this performance comes from a 20µm-pitch encoder

system that’s a fraction of the cost of 4µm and 2µm pitch encoders –

now that’s value.

Customization and Technical Suppor t

At MicroE Systems, we recognize the importance of customization.

Many applications require a specific cable length, connector or

pinout. Our manufacturing processes make your “customized” part

just like a standard assembly. You get encoders that exactly match

your application, and the reliability, quality and responsive lead

times you would expect with standard products

Global locations provide technical support in your language and time zone.

Headquar ters

Direct Sales Offices

Sales Channel Par tners

Technology Center

Flexible Delivery

Modern OEM

customers must have

their orders filled in

1-2 weeks with little

forecast visibility.

MicroE Systems has

professional supplychain management,

world-class quality

systems and a linear manufacturing process specifically designe

fill new OEM orders rapidly. Product designs that are modular an

configurable complete the story, making MicroE Systems one of

most responsive suppliers you can specify.

Quality and Reliability Engineered in from the Start

Encoder applications require the highest levels of reliability.

That’s why we perform so many tests during product developme

design validation testing, environmental robustness, EMI immun

mechanical shock and a host of further tests We manufacture i

Our new, larger facility in Massachusetts is ISO 9001:2008 certified.

customers during each of four critical product development phas

we support you from over 30 direct sales and sales partner locat



Mercury IITM

Family of Encoders:The Next Generation

Superior Per formance.World-Class Reliabilit y.

MicroE Systems revolutionized encoder

technology with the original Mercury™ encoder

family. Smaller, faster, and smarter than

anything before, it set the standard for

innovation. Now, the growing Mercury II

line of encoders takes another giant step

forward by giving you all this, plus more performance,

tape scales, dual limits and more. Comprehensive testing and

manufacturing to ISO9001:2008 quality standards makes for world-

class robustness and reliability.

PERFORMANCE WITHOUT COMPROMISE

Mercury II’s encoder technology achieves the highest resolution and

accuracy in its class, with low cyclical error, low jitter and low

power consumption.

UNSURPASSED EASE OF USE

• Broadest Alignment Tolerances

• Setup LEDs

• Built-in or Stick-on Optical Index and Limits*

• Cut-to-Length Tape Scale

Broadest Alignment Tolerancesfor Easy Installation and Setup

Mercury II has the broadestalignment tolerances in the

industry, a full ±2 degrees. That

makes it the easiest and the fastest

sensor to align and setup; you can

align the Mercury II sensor in

under 30 seconds.

Built-in or Stick-on Optical Indand Limits*

Order tape or linear glass scales

with built-in markers for fastest

installation, or install stick-on indand limit markers anywhere on cu

to-length tape scales. Mercury II’s

optical index is bi-directional and

repeatable at full speed.

*Limits available on MII 6000 & MII 5000 models

PurePrecisionTM Tape Scalein Continuous Lengthsup to 30 Meters

The Tape Scale’s cut-to-lengthcapability reduces inventory

costs and lead times The

±

Accuracy Cyclical Error* Long Travel

With Tape Scale ±30nm typical ≤ ±5µm**(Linear)

With Glass Scales ±20nm typical High accuracy grade:(Linear) up to ±1µm†

Standard accuracy grade:±1.5µm†

* MII 6000/5000 accuracy within a 20µm signal period † See data sheets for full specifications

**Over any one meter of travel after slope correction in the customer’s controller

Model Resolution Output Maximum Speed Scales

MII 6000 5µm - 1.2nm Digital 10m/s Tape or Glass;Linear & Rotary

MII 5000 5µm - 1.2nm Digital 10m/s Tape or Glass;

Linear & RotaryMII 1900 5µm - 1.2nm Analog 7.2m/s Tape or Glass;

Linear

MII 1600 5µm - 0.5µm Digital 20m/s Tape; Linear

Mercury II’s low cyclical error surpasses every other 20µm encoder.

The result: smoother velocity control for linear motors and wire

bonders, better linear positioning, and more.

Mercury II Cyclical Error with Glass Scales



InnovativeMercury II

TM

Technology

Integrated Sensor Design for Less Power Consumption,Smaller Sensors

Mercur y II ™ Encoder Models

VERSATILITY WITHOUT COMPROMISE

• Low Z-Height Sensor: as low as 8.2mm

• Low Mass Sensor: as low as 3g

• Cut-to-Length Tape Scale up to 30 Meters Long

• SmartPrecision ™ II Software

Small Sensor for Faster, More CompactMotion Systems

With Mercury II, you get the smallest 1.2nm

capable sensor for compact system designs;plus, you can select the best scale for yourapplication: tape or glass, linear or rotary.

SmartPrecision II Sof twarefor Unmatched Monitoringand Diagnostics

Our encoder software enables

setup, real time monitoring,

and a variety of data plots;

programmable resolution,

output frequency and output

• Advanced Optical Design – Contamination Resistant – Automatic Gain Control

• Separate Left and Right Limits (M II 6000 &M II 5000 Models)

• High Noise Immunity – Double-Shielded Cable – Differential Outputs

• RoHS Compliant

• CE Compliant

ROBUSTNESS WITHOUT COMPROMISE

MII 6000 MII 5000 MII 1900 MII 1600

Power 0.90W* 0.90W 0.24W 0.24W

Consumption *0.25 for sensor

Sensor 8.2mm 11.0mm 8.7mm 8.7mmHeight

MERCURY II 6000

Smallest Sensor, Ultra-HighResolution and Accuracy,Tape or Glass Scales

• Programmable Resolution: 5µm – 1.22nm Linear,to 268M CPR Rotary

• Output: Digital A-quad-B or High Speed Serial

• Scales: 20µm Tape or Glass, Linear or Rotary

• Vacuum models for up to 10 -8 torr

MERCURY II 5000

Ul tra-High Performance,Digital Output from theSensor, Tape orGlass Scales

• Programmable Resolution: 5µm – 1.2nm Linear,to 268M CPR Rotary


• Scales: 20µm Tape or Glass, Linear or Rotary

MERCURY II 1900

High Performance, AnalogOutput from the Sensor,Tape or Glass Scales

• Resolution: 5µm – 1.2nm Linear

• Output: Analog Sin/Cos 1Vpp

• Scales: 20µm Tape or Glass

MERCURY II 1600

Up to 0.5µm Resolution,Digi tal Output from theSensor, Tape Scales

• Resolution: 5µm - 0.5µm Linear

• Output: Digital A quad B

LOWEST POWER CONSUMPTION IN THE INDUSTRY

• Mercury II ’s patented optical system and integrated sensor design dramatically cuts power consumption - and sensor size



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Next-Generation Sensor

for Resistance to Contamination

Mercury II’s sensor has an improved optical design and Automati

Gain Control for contamination resistance: fingerprints, oil, dust, e

One Sensor: Tape or Glass, Linear or Rotary ScalesWith MII 6000, the same sensor works with tape and

glass scales, saving design time and reducing the number

of unique parts.

PurePrecisionTM Tape or High AccuracyLinear Glass Scales

PurePrecision tape scale is the easiest tape to install and use

Cut it to any length you need; adhesive backing and our

unique application tool make installation fast and accurate.

Use linear glass scales for the highest accuracy and precise

thermal management.

Built-In or Stick-On Optical Index and Limits

Choose from built-in index and limit markers for

fastest installation, or stick-on markers for place-

anywhere flexibility with cut-to-length tape scale

applications. Mercury II’s space-saving index and

limit markers fit within the 6mm width of the tape

scale. The bi-directional optical index provides

1 LSB repeatability at all speeds, while left and right

optical limits enhance safety and reduce cabling.

Programmable Features for System Flexibility

MII 6000 provides user programmable or factory-set resolutio

output bandwidth, and low-pass filtering. No other encoder o

this capability to accelerate motion system prototyping or gre

flexibility for complex motion systems.

Status LEDs Show System Status at a Glance

Status LEDs show signal strength and index/limits conditions

at all times.

SmartPrecisionTM

II SoftwareAdds Unique Functionality

MII 6000’s optional software allows

Compact Z Height Design

MII 6000’s sensor is only

8.2mm high, enabling more

compact motion systems.

Broadest AlignmentTolerances in theIndustry

Mercury encoders have

the widest Z and theta Z

MII 6000 IS THE ONLY DIGITAL-OUTPUT ENCODER WITHALL THESE FEATURES:

• 8.2mm sensor Z-height • Integral dual limits

• Stick-on index and limits • Up to 1.2nm resolution

• Programmable resolution • A-quad-B or high speed and settings serial word outputs

MII 6000 APPLICATIONS

• Nanometer-Scale Motion • Metrology

• Piezo-Motor Stages • XY Stages

• Wafer Inspection & Processing • Tunable Optic Systems

• Automated Optical Inspection • Microscope Stages

Mercury II ™ 6000

Smallest Sensor, Ultra-High Resolut ion and Accuracy Digital Output Encoder

Uses Metal Tape, Linear Glass, or Rotary Glass Scales

Mercury II 6000’s programmable resolutions range from 5µm to 1.2nm,with accuracy up to ±1µm; the same sensor works with tape or glassscales, either linear or rotary. Excellent cyclical error (short-rangeaccuracy) means smooth velocity control. Performance, small sensorsize, robustness, versatility and ease of use make MII 6000 thehigh performance choice.

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System Performance

Resolution Linear Rotary

5µm to 1.2nm 20k CPR to 268M CPR

Accuracy Cyclical Error* Long travel

With Tape Scale ±30nm typical ≤ ±5µm**(Linear)


Std. accuracy grade:up to ±1.5µm†

*Accuracy within a 20µm signal period † See data sheet for full specifications


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Digital Output Right From the Sensor

All electronics are in the sensor, including programmablefeatures and interpolation up to x16384. You get the highestsystem reliability, the smallest footprint, and a variety ofconnector options - even your own connector.

Nex t-Generation Sensor for Resistance to Contaminatio

Mercury II’s sensor has an improved optical design and AutomatiGain Control for contamination resistance: fingerprints, oil, dust, e

One Sensor: Tape or Glass, Linear or Rotary Scales

With MII 5000, the same sensor works with tape andglass scales, saving design time and reducing the numberof unique parts.

PurePrecisionTM Tape or High Accuracy Linear Glass Sca

PurePrecision tape scale is the easiest tape to install anduse. Cut it to any length you need; adhesive backing and ourunique application tool make installation fast and accurate.Use linear glass scales for the highest accuracy and precisethermal management.

Built-In or Stick-On Optical Index and Limits

Choose from built-in index and limit markers forfastest installation, or stick-on markers for place-anywhere flexibility with cut-to-length tape scaleapplications. Mercury II’s space-saving indexand limit markers fit within the 6mm width ofthe tape scale. The bi-directional optical index

provides 1 LSB repeatability at all speeds, whileleft and right optical limits enhance safety andreduce cabling.

Programmable Features for System Flexibility

MII 5000 provides user programmable or factory-set resolutiooutput bandwidth, and low-pass filtering. No other encoder othis capability to accelerate motion system prototyping or greflexibility for complex motion systems.

SmartPrecisionTM

II SoftwareAdds Unique Functionality

MII 5000’s optional software allowssetup monitoring diagnostics and



11mm high, enabling more

compact motion systems.

Broades t AlignmentTolerances in the Industry

Mercury encoders have the

MII 5000 IS THE ONLY DIGITAL-OUTPUT ENCODER WITH

ALL THESE FEATURES:

• 11mm sensor Z-height • Integral dual limits

• Stick-on index and limits • Up to 1.2nm resolution

• Programmable resolution • A-quad-B or high speed and settings serial word outputs


• Linear Motors • Metrology

• FPD Manufacturing • XY Stages and Gantries

• Wafer Inspection & Processing • Tunable Optic Systems • Automated Optical Inspection • Microscope Stages

Mercury II ™ 5000

Miniature, Ultra-High Resolut ion and Accuracy Digit al Output Encoder

Ideal for High Performance 0.1µm DigitalFrom-the-Sensor Applications

Uses Metal Tape, Linear Glass, or Rotary Glass Scales

Mercury II 5000’s programmable resolutions range from 5µm to 1.2nm,

with accuracy up to ±1µm; the same sensor works with tape or glass

scales, either linear or rotary. Excellent cyclical error (short-range

accuracy) means smooth velocity control. Performance, robustness,

versatility and ease of use make MII 5000 the high performance choice.

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System Performance

Resolution Linear Rotary

5µm to 1.2nm 20k CPR to 268M CPR

Accuracy Cyclical Error* Long travel

With Tape Scale ±30nm typical ≤ ±5µm**

(Linear)


Std. accuracy grade:up to ±1.5µm†

*Accuracy within a 20µm signal period † See data sheet for full specifications




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Analog Output Right from the Sensor

All electronics are in the sensor. You get the highest system

reliability, the smallest footprint, and a variety of connector

options - even your own connector.

Nex t-Generation Sensor for Resistance to Contamination

Mercury II’s sensor has an improved optical design and

Automatic Gain Control for contamination resistance:

fingerprints, oil, dust, etc.

PurePrecisionTM Tape or High Accuracy LinearGlass Scales

PurePrecision tape scale is the easiest tape to install and u

Cut it to any length you need; adhesive backing and our uni

application tool make installation fast and accurate.

Use linear glass scales for the highest accuracy and precise

thermal management.

With MII 1900, the same sensor works with both types of

scales, saving design time and reducing the number of uniq

parts in your system design.

Built-In or Stick-On Optical Index

Choose from a built-in index mark for fastest installation, o

stick-on marker for place-anywhere flexibility with cut-to-le

tape scale applications. Mercury II’s space-saving index ma

fits within the 6mm width of the tape scale. The bi-directiooptical index provides 1 LSB repeatability at all speeds.

Choice of Connector Styles

Choose from a fully-shielded 15-pin D-sub connector or

customer-specified connector.

Smar tPrecisionTM

II Software

Optional software adds

• 1Vpp sin/cos output • Speeds up to 7.2m/s

• Bi-directional optical index with repeatability at full system speed

• High EMI noise immunity and tolerance to contamination

• XY Stages and Gantries • Linear Motors

• FPD Manufacturing • Wafer Processing

• Wire & Die Bonders • Metrology

• Pick and Place Systems • Wafer Inspection


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MII 1900’s sensor is only 8.7mm

high, enabling more compact

motion system designs.

Broadest AlignmentTolerancesin the Industry

Our next generation sensor2o

Mercury II ™ 1900

Miniatur e, High Per for mance Analog Output Encoder

All Electronics in the Sensor

Uses 20µm Metal Tape or Linear Glass Scales to Achieve the Highest Resolution with YourInterpolation Electronics

For high performance with linear tape or glass scales,

the Mercury II 1900 analog encoder delivers. It fits compact

designs and provides high accuracy, speed, and high-fidelity

signals for resolutions from 5µm to 1.2nm, depending on

your controller. Cut-to-length tape scale applies quickly;

linear glass scales provide high accuracy – up to ±1µm.

The stick-on index and broad sensor alignment tolerances

mean setup in seconds.

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System Performance

Resolution Linear

5µm to 1.2nm, depending oncustomer interpolation

Accuracy Long travel

With Tape Scale (Linear) ≤ ±5µm*

With Glass Scales (L inear) High accuracy grade: up to ±1µm†

Standard accuracy grade: up to ±1.5µm†

*Over any one meter of travel after slope correction †See data sheet for full specificationsin the customer’s controller



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Digital Output Right from the Sensor

All electronics are in the sensor, including up to x40interpolation. You get the highest system reliability, the

smallest footprint, and a variety of connector options - even

your own connector.

Next-Generation Sensor for Resistance to Contaminat

Mercury II’s sensor has an improved optical design and

Automatic Gain Control for contamination resistance:

fingerprints, oil, dust, etc.

PurePrecisionTM Tape, the Nex t Generation Tape Scale

PurePrecision tape scale is the easiest tape to install and u

Cut it to any length you need; adhesive backing and our uni

application tool make installation fast and accurate.

Built-In or Stick-On Optical Index

Choose from a built-in index mark for fastest installation, or

stick-on marker for place-anywhere flexibility with cut-to-le

tape scale applications. Mercury II’s space-saving index ma

fits within the 6mm width of the tape scale. The bi-directio

optical index provides 1 LSB repeatability at all speeds.

Choice of Connector Styles

Choose from a fully-shielded 15-pin D-sub connector or

customer-specified connector.

Smar tPrecisionTM

II Sof tware

Optional software adds capabilityto perform setup, monitoring,diagnostics and data plots.

• Linear Motors and Stages • XY Positioning Tables

• Lab Automation • Assembly Automation

• Metrology and Inspection • Pick and Place Systems

• Medical Equipment • Printing Equipment

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Mercury II ™ 1600

Up to 0.5µm Resolut ion Digital Output Encoder

All Electronics in the Sensor

Uses Metal Tape Scales for EconomicalMotion Control Designs

The Mercury II 1600 digital output sensor, combined with thecut-to-length tape scale, provides repeatability and resolution of5µm to 0.5µm. The stick-on index and broad sensor alignmenttolerances mean that setup takes seconds, high EMI immunityand tolerance to contamination translate to reliable operation, andhigh bandwidth provides speeds up to 20m/s. MII 1600 is the bestchoice for applications requiring 5µm to 0.5µm of resolution.

System Performance

• Resolution and repeatability: 5µm to 0.5µm

• Accuracy: ≤

±5µm (over any one meter of travel after slope correction in the customer’s controller)

• Speeds up to 20m/s

• Bi-directional optical index with repeatability at full speed

• High EMI noise immunity and tolerance to contamination

A Compact Z Height Design


8.7mm high, enabling more

compact system designs.

Broadest AlignmentTolerances in the Industry

Mercury encoders have

the widest Z and theta-Z

tolerances for fast setup.±2

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PurePrecisionTM

Tape and Glass Scales ForMercury II

TM

Encoders

For Easy Installation and Superior Performance Tape Scales

PurePrecision tape is the easiest tape scale to install and

use. Cut it to any length you need from a coil, or order pre-cut

lengths with built-in index and limits to make installation even

faster. Its adhesive backing makes application easy and accurate.

• Cut to any length at the time of installation, or order pre-cut

• Measuring length up to 30m

• Only 6mm wide, including index and limits; low profile

• Choose from built-in or stick-on optical index and limit markers

• Resists effects of scale contamination – dust, dirt, fingerprints, oil spots, etc.

Glass Scales

Use linear glass scales for the highest accuracy and precise thermal

management. Rotary glass scales are available with or without hubs,

and in arc segments.

• Highest accuracy – up to ±1µm

• Only 6mm wide, including index and limits (applications ≤130mm)

• Custom options – special widths, thicknesses, near-zero CTE materials,diameters, or rotary arc segments

Model Tape Linear Glass Rotary Stick-On Stick-OnScale Scales Scales Index Limits

MII 6000 • • • • •

MII 5000 • • • • •

SCALES & INDEX / LIMIT MARKERS FOR MERCURY II MODELS

SPECIFICATIONS FOR MERCURY II SCALES

Linear Tape Linear Glass Rotary Glass

Scales Scales Scales

Length 50mm - 30m 18mm - 1m 44mm - 121mm dia.

Cut to any length •from a dispenser

Order pre-cut to a • •a specified length

Accuracy ≤ ±5µm* up to ±1µm up to ±2.1 arc-sec.

CTE 13ppm/°C** 8ppm/°C 8ppm/°C

Built-in index and limits • • •

Stick-on index and limits • •

* Over any one meter of travel after slope correction in the customer’s controller

** Thermal expansion of the tape scale is matched to the substrate by fixing the endsof the scale with epoxy

Mercury II Accuracy:±1µm with High-Accuracy Grade Scales



CUT TO LENGTH OR PRE-CUT TAPE SCALES

The Best Tape Scale Solution Available

PurePrecision ™ Marker Tape

and Laser Tape scales set the

standard for flexibility and

ease of use. Order tape with

built-in index and limit*

markers, or cut any length

needed from a coil and apply

stick-on markers. There are

no index magnets to install

and adjust. Adhesive-mount

PurePrecision tape scale has

a 20µm pitch and is available in lengths up to 30 meters.* Limits available on MII 6000 and MII 5000 models

Easy Tape Installation

Simply feed the tape scale intothe installation tool and roll it

out along a benching edge to

perform adhesive mounting.

The tape can then be epoxied

at its ends, matching it to the

thermal response of the

substrate. Mounting is that

simple. PurePrecision tape scale

is made of nickel alloy for corrosion resistance, immunity to cleaning

solvents and long-term reliable performance.

CHOOSE FROM BUILT-IN OR STICK-ON INDEX AND LIMITS

Built-In Markers

PurePrecision Marker Tape

has built-in index and limit

marks to speed installation.

Manufactured into the tape

scale to your specifications

using a laser etch process,

installation of the tape scale

is reduced to one simple step:

just apply the adhesive-mount

tape scale to your system’s

mounting surface and you are

done. There is no need to

mount index or limit markers

or magnets. The laser-written

marks are placed in the exact locations you specify – index location,

number of index marks and limit mark lengths can all be specified at

the time of ordering. PurePrecision Marker Tape may be ordered in

pre-cut lengths for the fastest installation, or in continuous form for

cutting at your site.

Stick-On Markers

PurePrecision Laser Tape works with Mercury II™’s stick on index and

Mercury II’s stick-on optical index Index magnet used by other encode

USE GLASS SCALES WHEN YOU NEED:

• Highest accuracy – to ±1µm • Short travel lengths

• Uniform thermal behavior • Custom configurations

• Ultra-smooth velocity control • Rotary scales

Mercury II’s 20µm pitch glass scales are available in lengths fro

10mm to 1m and rotary diameters up to 121mm Custom scales

PurePrecision ™ Tape Scales

SMALLEST TAPE SCALE SYSTEM AVAILABLE

Unlike other encoders, Mercury II’s optical index and limits requ

no additional space. They mount directly on the 6mm wide tape

scale - no unwanted magnets or mounting hardware taking up s

PurePrecision ™ Glass Scales

Enlargement showing built-in index

tape scale and then stick on the markers. The stick-on markers e

work on linear glass scales.

Brand X

22mm

Brand Y

13.5mm

MercuryII

6.0mm



MercuryTM

: The OriginalMiniature Encoders

MicroE Systems introduced Mercury encoders to help

equipment designers achieve smaller and faster systems. Originally

three models, the Mercury series of encoders has grown to 11

models due to an expanding range of applications requiring more

resolution, speed and even smaller sensors. Motion system

engineers around the world specify Mercury encoders when their

linear or rotary applications demand high performance from the

smallest possible sensor. Comprehensive testing and manufacturing

to ISO9001:2008 quality standards ensure long-term reliability.

HIGH PERFORMANCE FROM ULTRA-SMALL SENSORS

Mercury’s encoder technology achieves high resolution and low

power consumption with the smallest possible sensors.

UNSURPASSED EASE OF USE

Broadest Alignment Tolerances forEasy Installation and Setup

Mercury has the broadest alignment

tolerances in the industry, a full ±2

degrees. That makes it the easiest and

the fastest sensor to align and setup.

No instrumentation is needed; you can

Accuracy Long Travel

With Glass Scales (L inear) High accuracy grade: up to ±1µm†

Standard accuracy grade: ±3µm†

† See data sheets for full specifications

Incredible Performance from Such aSmall Package

± 2o

SMALLER SENSORS FOR SMALLER, LIGHTER MOTION SYSTE

Mercury’s patented optical system

results in the most compact sensorsin their class. Achieve low mass

motion systems with more rapid

accelerations and higher system

throughputs using Mercury’s 6mm

wide linear scales, rotary scales as

small as 12mm in diameter, low-

mass rotary arc segments, and sensors as small as 5.6mm high

weighing only 2.6 grams. Plus, the same sensor models work in

linear and rotary applications.

Low power consumption – as low as 0.17 Watts – provides furth

advantages in thermal stability and for portable equipment.

DUAL-AXIS MODELS

Mercury 3000 Dual AxisAverager models combine

feedback from two sensors

and average them in real

time. The result is higher

accuracy in rotary

applications than can be

achieved with one sensor –

scale eccentricity errors are

virtually eliminated. Outputs

can be A-quad-B or high speed serial.

Model Heigh t Weight Power Consumptio

M 1200 5.6mm 2.6g 0.17W

M 1500P 5.6mm 2.6g 0.17W

ChipEncoder 3.1mm 0.6g 0.18W

Model Resolution Output Features Scales

M 3500 5µm - 5nm Digital Programmable Glass;Linear & Rotary

M 1500 5µm - 0.5µm Digital Digital from Glass;

the Sensor L inear & RotaryM 1000 5µm - 78nm Analog 1Vpp Output Glass;

Linear & Rotary

M 1200 5µm - 78nm Analog PCB Mount Glass;Linear & Rotary

M 1500P 5µm - 0.5µm Digital PCB Mount Glass;Linear & Rotary

ChipEncoder™ 10µm - 1µm Digital PCB Mount Glass;Linear & Rotary



InnovativeMercury

TM

Technology

Less Power Consumption,Smaller Sensors

PC BOARD MOUNT

Mercury 1200, Mercury 1500P and

ChipEncoder models mount directly on

your PC board – providing significant

space and cost savings through design

integration. Mercury 1200’s analog

outputs can be interpolated by your

electronics – or a chipset available from

MicroE Systems for use on your PC board

– for resolution up to 78nm (linear).

Mercury 1500P and ChipEncoder have

built-in interpolation that produces digital

outputs with up to 0.5µm resolution

(linear). All models work with rotary

scales as small as 12mm diameter. And

all this comes in the smallest packages.

WIDE RANGE OF SCALES

Linear and rotary 20µm

pitch glass scales are

available in lengths from13mm to 2m, and diameters

up to 121mm. Accuracy of

±1µm is available using

high accuracy grade linear

scales. Widths as low as 6mm compliment Mercury’s space-efficient

sensors for the smallest possible motion systems. Built in index

marks complete your application. Custom widths, thicknesses,

diameters, arc segments, index configurations, and near-zero CTE

materials are available for OEM orders.

Rotary Rotary

Standard Hub

Outer Dia. Available

12.00mm Yes

19.05mm Yes

31.75mm Yes

57.15mm Yes

107.95mm Yes

139.7mm Yes

Linear

Standard

Lengths

13mm

25mm

50mm

75mm

100mm

125mm

150mm

2020mm

...

Mercury ™ & ChipEncoder ™ Models

MERCURY 3500, 3000, 2000

Small Sensor, HighResolution and Accuracy

• Programmable Resolution: 5µm – 5nm Linear Up to 67M CPR Rotary


• Scales: 20µm Glass, Linear or Rotary

• Multi Axis Models

MERCURY 1500

Digi tal Outputfrom the Sensor

• Resolution: 5µm – 0.5µm Linear Up to 665k CPR Rotary

• Output: Digital A-quad-B


MERCURY 1000

1Vpp Analog Output

• Resolution:

5µm – 78nm Linear Up to 4.2M CPR Rotary



MERCURY 1200 & 1500P

PCB Mount, Analogor Digital Outputfrom the Sensor

• Resolution:

5µm-78nm Linear (M 1200) 5µm – 0.5µm Linear (M 1500P) Up to 4.2M CPR Rotary


CHIPENCODER

PCB Mount, Digi tal Outputfrom the Sensor

• Resolution: 10µm – 1µm Linear Up to 300k CPR Rotary


Rotary Segments

Arc Segment

Radius: 6mm or greater



Mercur y ™ Vacuum Models

High Per formance at High Vacuum with the Smallest Encoders

Rotary Rotary

Standard Hub

Outer Dia. Available

12.00mm Yes

19.05mm Yes

31.75mm Yes

57.15mm Yes

107.95mm Yes

139.7mm Yes

Linear

Standard

Lengths

13mm

25mm

50mm

75mm

100mm

125mm

The Smallest Vacuum Encoders

Mercury™ and Mercury II™ vacuum

encoders are specified in a wide range of applications

due to their combination of performance, small size, and high

vacuum rating. Choose from models with programmable digital

output, analog output, or digital output right from the sensor, all

constructed using vacuum-compatible materials rated up to 10-8 torr.

All sensors can be used with linear, rotary and arc segment scales.

HIGH PERFORMANCE IN THE SMALLEST PACKAGE

With sensors only 8.2mm tall, capable of resolutions up to 1.2nm

and cyclical error of ±20nm, unsurpassed motion system performance

is achieved in the most compact vacuum applications. Plus, thermal

effects are minimized due to the low power consumption of Mercury

encoder sensors – only 0.25W for most models.

All models perform at 10-8 torr with negligible outgassing. Bake out

is rated at 150°C for 48 hours. And Mercury and Mercury II vacuum

encoders perform in high magnetic field environments.

WIDE RANGE OF SCALES

Vacuum-compatible linear

and rotary 20µm pitch

glass scales are available

in lengths from 13mm to

2m, and diameters up to

121mm. Accuracy of ±1µm

is available using high

accuracy grade linear scales. Widths as low as 6mm compliment

Mercury’s space-efficient sensors for the smallest possible motion

systems. Built in index and limit marks* complete your application.

Custom widths, thicknesses, diameters, arc segments, index /

limit configurations, and near-zero CTE materials are available

for OEM orders.

* Limits available on MII6800V models

MERCURY II 6800V

Small Sensor, Ultra-HighResolution and Accuracy,Glass Scales

• Programmable Resolution: 5µm – 1.2nm Linear Up to 268M CPR Rotary

• Output: Digital A-quad-B or High Speed Serial; dual limits

• Vacuum up to 10 -8 torr; 150°C bakeout at 48 hours

MERCURY 3500V, 2000V

Small Sensor, High

Resolution and Accuracy,Glass Scales

• Programmable Resolution: 5µm – 5nm Linear Up to 67M CPR Rotary



MERCURY 1000V

High Performance AnalogOutput, Glass Scales

• Resolution: 5µm – 78nm Linear Up to 4.2M CPR Rotary



MERCURY 1500V

Up to 0.5µm Resolution,Digital Output from theSensor, Glass Scales

• Resolution: 5µm - 0.5µm Linear

Up to 665k CPR Rotary



MicroE Systems has more than a decade of experience designing

and manufacturing critical components and ultra-precision

positioning systems for the data storage industry. Today we supply

these components to the majority of hard disk drive (HDD)

manufacturers around the world, enabling cost-effectivemanufacturing of HDD’s with capacities exceeding 1TB.

PRODUCTS

• 25D, 25B, S15, H15 and F15 Shaft and Hollow-Shaft Sealed

Rotary Encoders; Resolutions up to 200,000 CPR

• HT30, T23B, and TK91 Kit-style Rotary Encoders for Motors;

Resolutions up to 100,000 CPR

• LDK Kit-style Linear Encoders; Resolutions up to 0.5µm

Based on decades of field-proven reliability and performance, DRC

incremental encoders are well known for fast and easy installation

using industry-standard mechanical and electrical interfaces.

Choose from sealed or kit-style rotary encoders, kit-style linear

encoders, or sealed linear length gages featuring:

• Optical encoder technology with LED light source for long life

and highest performance

• Differential digital outputs with available zero reference

• Custom versions available for OEM applications

• Sealed Rotary Shaft and Hollow Shaft Encoders

• Rugged, reliable incremental rotary motor encoders

• Resolutions from 400 to 360,000 Counts per Rev., with a wide range of shaft / coupling sizes, mounting options, connector

styles and cable lengths

• High accuracy, high temperature, high shaft load and extra high vibration-resistant models

Data Storage Products

PRODUCTS

• G1400 and G1600 High Accuracy Rotary Encoders

• PE100 High Speed Rotary Encoders

• PA200G and PA2046G Rotary Positioners

• MP7000 Positioner for Media Writers

• MCB2 and SA200a Motion Control Subsystems

DRCTM

Encoders



Mercury II 5000Series Encoders

page 7

Mercury II 6000Series Encoders

page 6

Encoder Selector Char t

Model Features Specifications

Programmable resolution and

filtering, small sensor, stick-on

index and limits, easy

alignment, setup software

• Linear Resolution: 5µm – 0.0012µm*

• Rotary Resolution: 20k CPR – 268M C

• Output: A-quad-B, Index, Dual Limits

and Alarm; High Speed Serial Interfac

• Tape, Linear Glass or Rotary Glass Sca


• Rotary Resolution: 20k CPR – 268M C

• Output: A-quad-B, Index, Dual Limits

and Alarm; High Speed Serial Interfac

• Tape, Linear Glass or Rotary Glass Sca

MERCURY II ™ ENCODERS

• Digital or analog output from

the sensor• Tape or glass scales with

index & limits

MERCURY ™ ENCODERS

• Smallest sensors

• Glass scales

• Screw mount or PC board mount

• Linear Resolution: 5µm – 0.0012µm

• Output: Analog Sin/Cos with Index

• Linear Tape or Glass Scales


• Output: A-quad-B with Index

• Tape Scales


• Rotary Resolution: 6.6k CPR – 67.1M

• Output: A-quad-B with Index;

Serial Interface

• Linear or Rotary Glass Scales

• Linear Resolution : 5µm – 0.5µm

• Rotary Resolution: 6.6k CPR - 655k CP




• Rotary Resolution: 6.6k CPR - 4.2M CP

• Output: Sin/Cos with Index



• Rotary Resolution: 6.6k CPR – 268M C

• Output: A-quad-B with Index; Serial

Interface; Analog Sin/Cos with Index


Analog output encoder,

resolution set by customer

controller; small sensor; stick-on

index; easy alignment; setupsoftware

Digital output with up to

0.5µm resolution, small sensor,

stick-on index, easy alignment,

setup software

Programmable resolution,

output frequency & alarms;

small sensor; easy alignment;

setup software

Digital output with fixed

resolution, small sensor, easy

alignment, setup software

Analog output encoder,

resolution set by customer

controller; small sensor; easy

alignment; setup software

Small sensor; programmable

resolution, output frequency &

alarms; easy alignment; setupsoftware; rated to 10-8 torr

Mercury II 1900Encoders

page 8

Mercury II 1600Encoders

page 9

MercuryProgrammableEncoders

page 12

MercuryDigital OutputEncoders

page 12

MercuryAnalog OutputEncoders

page 12

MercuryVacuum

Encoderspage 14

Smallest sensor, programmable

resolution and filtering, stick-on

index and limits, easy alignment,

setup software, vacuum models

for up to 10-8 torr

ChipEncoder

page 12

CHIPENCODER ™

• Smallest PC board

mount sensor

• Linear Resolution : 10µm – 1µm

• Rotary Resolution: 3k CPR - 327k CPR


Li R t Gl S l

Digital output with up to

1µm resolution, small PC

board mount sensor

MERCURY ™ VACUUM ENCODERS

• Smallest vacuum sensors• Glass scales

MicroE Systems 2011 Catalog

Documents