mems.seas.upenn.edumems.seas.upenn.edu/publications/1986/The Use of Microfabricated Structures for the...Journal of Adhesion, 115 (1983) Peterson, "Silicon as a Mechanical Material"

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mems.seas.upenn.edumems.seas.upenn.edu/publications/1986/The Use of Microfabricated Structures for the...Journal of Adhesion, 115 (1983) Peterson, "Silicon as a Mechanical Material"

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