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MEMS/NEMS – Micro Resonators Courtesy of (a) D. Freeman (b) O. Brand (c), F. Ayazi and (d) C. Nguyen (a) (b) (c) 100 MHz (d) 651 MHz
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MEMS/NEMS – Micro Resonators

Jan 15, 2016

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MEMS/NEMS – Micro Resonators. (a). (c) 100 MHz. (b). (d) 651 MHz. Courtesy of (a) D. Freeman (b) O. Brand (c), F. Ayazi and (d) C. Nguyen. Micro Resonators – Q Problem. Q = 4550 Required Q = 10,000. Courtesy of Professor C. Nguyen. Micro Resonators – Q Problem. Q = 27. - PowerPoint PPT Presentation
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Page 1: MEMS/NEMS – Micro Resonators

MEMS/NEMS – Micro Resonators

Courtesy of (a) D. Freeman (b) O. Brand (c), F. Ayazi and (d) C. Nguyen

(a)

(b)

(c) 100 MHz

(d) 651 MHz

Page 2: MEMS/NEMS – Micro Resonators

Micro Resonators – Q Problem

Courtesy of Professor C. Nguyen

Q = 4550Required Q = 10,000

Page 3: MEMS/NEMS – Micro Resonators

Micro Resonators – Q Problem

Q = 27