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Materials forSmart Systems III
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MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 604
Materials forSmart Systems III
Symposium held November 30-December 2, 1999, Boston,
Massachusetts, U.S.A.
EDITORS:
Marilyn Wun-FogleCarderock Division, Naval Surface Warfare
Center
West Bethesda, Maryland, U.S.A.
Kenji UchinoPennsylvania State University
University Park, Pennsylvania, U.S.A.
Yukio ItoRutgers University
Piscataway, New Jersey, U.S.A.
Rolf GotthardtEcole Polytechnique Federate de Lausanne
Lausanne, Switzerland
Materials Research SocietyWarrendale, Pennsylvania
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Society Symposium Proceedings: Volume 604:Materials for Smart
Systems IIIEditors: Marilyn Wun-Fogle, Kenji Uchino, Yukio Ito and
Rolf GotthardtFrontmatterMore information
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CONTENTS
Preface xi
Acknowledgments xiii
Materials Research Society Symposium Proceedings xiv
PIEZOELECTRICS
Dielectric Properties of Highly Oriented Lead Zirconium
TitanateThin Films Prepared by Reactive RF-Sputtering 3
S. Kalpat, X. Du, I.R. Abothu, A. Akiba, H. Goto, S.
Trolier-McKinstry,and K. Uchino
Aluminum Nitride Thin Films for Microwave Filter and
MicrosystemApplications 9
M-A. Dubois, P. Muralt, and L. Sagalowicz
* Characteristics of Piezoelectric Ceramics at High Vibration
Levels 15S. Takahashi, Y. Sasaki, M. Umeda, K. Nakamura, and S.
Ueha
Loss Mechanisms in Piezoelectrics—Extrinsic and Intrinsic Losses
25K. Uchino, J. Zheng, Y.H. Chen, X. Du, S. Hirose, and S.
Takahashi
Microstructural Effects on Piezoelectric Cracking 33C.C. Fulton
and H. Gao
Switching Current in Pb(Zni/3Nb2/3)O3-PbTiO3 Single Crystals
39Uma Belegundu, Xiaohong Du, and Kenji Uchino
Composite Piezoelectric Materials for Health Monitoring
ofComposite Structures 45
P. Blanas and D.K. Das-Gupta
Indentation of Piezoelectric Ceramics: Theory, Experiments
andApplications 51
Subra Suresh, Antonios E. Giannakopoulos, S. Sridhar,and U.
Ramamurty
* Invited Paper
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Effects of Electric Fields on the Bending Behavior of
PiezoelectricComposite Laminates 59
J.Q. Cheng, T.Y. Zhang, M.H. Zhao, C.F. Qian, S.W.R. Lee,and P.
Tong
High-Temperature Properties of Langasite 65H. Fritze, H.L.
Tuller, G. Borchardt, and T. Fukuda
New Concept for Resonant Longitudinal-Shear Ultrasonic Motor
71P. Bouchilloux, B. Koc, and K. Uchino
Considerations in the Development of a Piezoelectric
TransducerCochlear Implant 79
N. Mukherjee and R.D. Roseman
SHAPE MEMORY
*Shape Memory Alloys—Their Challenge to Contribute to
SmartStructures 87
C. Boiler
Characterization of NiTi Materials Using a Novel Aces
Methodology 99S.P. Mizar, M.I. Pech-Canul, and R.J.
Pryputniewicz
Stress-Induced Martensite in NiTi Corrugated Films 105Manfred
Wuttig, J.S. Slutsker, Kiyotaka Mori, andJiang Li
*Rapid-SoIidified Metallic Actuator Materials Developed
byElectromagnetic Nozzleless Melt Spinning Method 109
Y. Furuya
Zero Hysteresis in Shape-Memory Ti-Ni-X Films (X = Cu, Pd)Under
Constraint 117
B. Winzek and E. Quandt
Influence of Deformation Speed on Fatigue and TensileProperties
of a Ti-Ni-Cu Shape Memory Alloy 123
Y. Kishi, Z. Yajima, K. Shimizu, and M. Asai
High Hf Content NiTiHf Shape Memory Films 129Chen Zhang, Paul E.
Thoma, and Ralph Zee
* Invited Paper
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Superelastic Shape Memory Alloy For Seal Applications Producedby
Low Pressure Thermal Spray Technology 135
Albert Sickinger and Joseph P. Teter
Adaptive Composites With Embedded Shape Memory Alloy Wires
141J.A. Balta, M. Parlinska, V. Michaud, R. Gotthardt, andJ-A.E.
Manson
ACTUA TOR MA TERIALS
"Intelligent Gels 149Yoshihito Osada, Jian Ping Gong, and
Tetsuharu Narita
Shape Memory Ceramics 161T. Matsumura, T. Nakamura, M. Tetsuka,
K. Takashina,K. Tajima, and Y. Nishi
"Properties and Applications of Magnetorheological Fluids
167M.R. Jolly
i
"Monolithic Shape Memory Alloy Actuators": A New Concept
forDeveloping Smart Micro-Devices 177
Y. Bellouard, T. Lehnert, T. Sidler, R. Gotthardt, andR.
Clavel
POSTERS
Hypersonic and Dielectric Studies of Relaxor Ferroelectric
SingleCrystal 185
Chi-Shun Tu, V.H. Schmidt, C-H. Yeh, L-F. Chen, and C-L.
Tsai
Radial Bragg Grating Package for Temperature Compensation
inInterferometric Hydrophone Arrays 191
L.G. Carreiro, G.H. Ames, T.S. Ramotowski, and P.D. Curry
Application of Piezoelectric Materials for Use as Actuators
andSensors in Hard Disk Drive Suspension Assemblies 197
J.F. Heffelfinger and D.A. Boismier
•Invited Paper
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Electrical Properties and Power Considerations of a
PiezoelectricActuator 203
T. Jordan, Z. Ounaies, J. Tripp, and P. Tcheng
Temperature Dependence of High Field Characteristics in
PMN-PT-BTCeramics Containing Chemical Additives 209
Yong S. Cho, Chang H. Yoon, Steven M. Pilgrim, andKeith
Bridger
Doping Effects in Pb(Mgi/3Nb2/3)O3-PbTiO3 Ceramics for High
PowerTransduction Applications 215
Yun-Han Chen, Senji Hirose, Dwight Viehland, and Kenji
Uchino
The Effect of Hafnium and Thermal Cycling on the
TransformationTemperatures of NiTi-Based Shape Memory Alloys
221
Paul E. Thoma and John J. Boehm
Comparative Study of Structural and Neel Transition
Temperaturesin Fe-Mn-Si Shape-Memory Alloys 227
M.I.N. da Silva, G.J. de Arruda, P.E.F. Cortes, M.S. Andrade,R.
Paniago, and N.L. Speziali
High-Temperature Thermoelectric Properties of Silicon
BorideCeramics as a Smart Material 233
Noriyuki Takashima, Yasuo Azuma, and Jun-Ichi Matsushita
PbZro.52Tio.4sO3 Ferroelectric Thin Films on Silicon by
KrFExcimer Laser Ablation 239
K. Ebihara, F. Mitsugi, M. Yamazato, T. Ikegami, andJ.
Narayan
MAGNETOSTRICTIVE MATERIALS
*On Magnetostrictive Transducer Applications 247Alison B.
Flatau, Marcelo J. Dapino, and Frederick T. Calkins
Force Capability of a Planar Peristaltic Terfenol-D Motor 261MJ.
Gerver, J.H. Goldie, Won-Jong Kim, Jerome Kiley,and J.R.
Swenbeck
Energy Absorption and Damping in Magnetostrictive Composites
267G.P. McKnight and G.P. Carman
* Invited Paper
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Development of High Frequency Terfenol-D Transducer Material
273E.A. Lindgren, J.C. Poret, JJ. Whalen, M. Rosen, M.
Wun-Fogle,J.B. Restorff, and A.E. Clark
Modeling and Experiments for Deformation Under Load in
Ni-Mn-GaFerromagnetic Shape Memory Alloy 279
S.J. Murray, S.M. Allen, and R.C. O'Handley
A Model for Asymmetric Hysteresis in Piezoceramic Materials
285R.C. Smith and Z. Ounaies
A Mechanism for Magnetically Driven Shape Memory Alloys 291P.J.
Ferreira and J.B. Vander Sande
Formation and Characterization of Single Crystal Ni2MnGaThin
Films 297
J.W. Dong, L.C. Chen, S. McKernan, J.Q. Xie, M.T. Figus,R.D.
James, and C.J. Palmstrom
SENSOR AND OTHER MATERIALS
Sr(Ti,Fe)C>3: Materials for a Temperature Independent
ResistiveOxygen Sensor 305
W. Menesklou, H-J. Schreiner, R. Moos, K.H. Hardtl, andE.
Ivers-Tiffee
Molecular Recognition of Organic Compounds by Imprinted Silica
311Xiaoyi Gong, Jun Liu, and William D. Samuels
Electrical Conductivity of Piezoelectric Strontium
BismuthTitanate Under Controlled Oxygen Partial Pressure 317
C. Voisard, P. Duran Martin, D. Damjanovic, and N. Setter
Triboluminescence of Rare-Earth-Doped Aluminosilicates and
ItsApplication to Sensing of Structural Damage 323
Katsuhisa Tanaka, Tsuguo Ishihara, Koji Fujita, andKazuyuki
Hirao
De-Icing Layers of Interdigitated Microelectrodes 329Zoe
Courville and V.F. Petrenko
The Design of Organic Gelators Based on a Family of Bis-Ureas
335Rosa E. Melendez, Andrew J. Carr, Kazuki Sada, andAndrew D.
Hamilton
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Processing and Characterization of Cofired Capacitor andVaristor
Ceramics 341
B. Malic, M. Kosec, J. Razinger, and Z. Zivic
Magnetoimpedance: A Choice Property for Smart Materials 347K.L.
Garcia and R. Valenzuela
Structural Changes on Photochromism of Organic-InorganicHybrid
Materials 351
Keiichi Kuboyama and Kazumi Matsushige
Author Index 355
Subject Index 357
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PREFACE
This volume represents a record of the proceedings of Symposium
LL, "Smart Materials," heldNovember 30-December 2 at the 1999 MRS
Fall Meeting in Boston, Massachusetts, the thirdsymposium in the
series on "Smart Materials." In addition to the conventional
piezoelectric,magnetostrictive and shape memory materials, the
symposium was expanded to include electro-/magnetorheological
fluids and mechanochemical actuators. Seventy-one papers were
presentedover the course of three days. Of the fifty-one papers in
this volume, twenty-one (or roughly41%) came from outside the
U.S.
Piezoelectric actuators seem to have reached a rather mature
status. Various talks on theirreliability issues were presented. A
review of the high vibration-level characteristics for
PZTpiezoelectric ceramics, using both burst and continuous voltage
drive methods in order to measurethe temperature rise effect
separately, was presented. It was concluded that the mechanical
lossincreases significantly with the vibration stress. A promising
application for a disk-typepiezoelectric transformer, which
utilized a circular piezoceramic with an asymmetrical
electrodeconfiguration (Poster Award recipient) was reported.
Compared with the conventional rectangularshape, this new design
realized higher voltage step-up ratio and efficiency.
The session on Shape Memory Alloys (SMA) has shown that the SMA
are still prominentrepresentatives of smart materials and
contribute to smart structures. In order to use SMA in anoptimal
way, new characterization and fabrication methods, as well as
thermo-mechanicaltreatments, were presented and discussed. In
particular an interesting technology, where specialshapes of
materials are produced by low pressure thermal spraying, has been
applied to SMA inorder to produce foils, tubes or seals. The trend
to integrate SMA elements into compositescontinues. Thin film
composites with interesting properties have been developed in view
of anapplication as a microactuator, consisting of Ni-Ti based SMA
magnetron sputtered on metallicsubstrates. New adaptive composites
have been presented whose vibration frequency can bedisplaced when
prestrained Ni-Ti wires are embedded in a Kevlar fiber reinforced
epoxy matrixand activated by direct electrical current. A frequency
displacement of up to 50% was reported.
The session on Magnetostrictive Materials began with an overview
of magnetostrictivetransducer technology illustrating both
actuation and sensing applications. Composites
utilizingmagnetostrictive materials in the form of powders and thin
ribbons were developed for dampingand high frequency applications.
The relatively new area of magnetically activated shapememory
alloys in both bulk and thin film forms was introduced. Strains on
the order of 6% werereported in the Ni-Mn-Ga ferromagnetic shape
memory alloys.
The review on magnetorheological fluids gave us a better
understanding of their practicalcommercial market. Damper
applications of magnetorheo logical fluids have been expanded
toinclude truck seats and bicycles. An intriguing chemomechanical
actuator was introduced. Usingacrylic acid and n-stearyl acrylate
based gel, which can spread fluid on water continuously, a
tinywater vehicle made of soft gel was demonstrated.
All papers submitted for inclusion in the proceedings were
peer-reviewed in accordance withMRS procedures. We gratefully
acknowledge the contributions of the individual reviewers and
thesession chairs in making this a successful symposium.
Marilyn Wun-FogleKenji UchinoYukio ItoRolf Gotthardt
March 2000
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ACKNOWLEDGMENTS
Financial support for the symposium on "Smart Materials" was
provided by:
Office of Naval Research
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MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Volume 557— Amorphous and Heterogeneous Silicon Thin Films:
Fundamentals toDevices—1999, H.M. Branz, R.W. Collins, H. Okamoto,
S. Quha, R. Schropp,1999, ISBN: 1-55899-464-5
Volume 558— Flat-Panel Displays and Sensors—Principles,
Materials and Processes, F.R. Libsch,B. Chalamala, R. Friend, T.
Jackson, H. Ohshima, 2000, ISBM: 1-55899-465-3
Volume 559— Liquid Crystal Materials and Devices, T.J. Bunning,
S.H. Chen, L.C. Chien,T. Kajiyama, N. Koide, S-C.A. Lien, 1999,
ISBN: 1-55899-466-1
Volume 560— Luminescent Materials, J. McKittrick, B. DiBartolo,
K. Mishra, 1999,ISBN: 1-55899-467-X
Volume 561— Organic Nonlinear Optical Materials and Devices, B.
Kippelen, H.S. Lackritz,R.O. Claus, 1999, ISBN: 1-55899-468-8
Volume 562— Polycrystalline Metal and Magnetic Thin Films, D.E.
Laughlin, K.P. Rodbell,O. Thomas, B. Zhang, 1999, ISBN:
1-55899-469-6
Volume 563— Materials Reliability in Microelectronics IX, C.A.
Volkert, A.H. Verbruggen,D.D. Brown, 1999, ISBN: 1-55899-470-X
Volume 564— Advanced Interconnects and Contacts, D.C. Edelstein,
T. Kikkawa, M.C. Oztiirk,K-N. Tu, E.J. Weitzman, 1999, ISBN:
1-55899-471-8
Volume 565— Low-Dielectric Constant Materials V, J. Hummel, K.
Endo, W.W. Lee, M. Mills,S-Q. Wang, 1999, ISBN: 1-55899-472-6
Volume 566— Chemical-Mechanical Polishing—Fundamentals and
Challenges, S.V. Babu,S. Danyluk, M. Krishnan, M. Tsujimura, 2000,
ISBN: 1-55899-473-4
Volume 567— Ultrathin SiO2 and High-K Materials for ULSI Gate
Dielectrics, H.R. Huff,C.A. Richter, M.L. Green, G. Lucovsky, T.
Hattori, 1999, ISBN: 1-55899-474-2
Volume 568— Si Front-End Processing—Physics and Technology of
Dopant-Defect Interactions,H-J.L. Gossmann, T.E. Haynes, M.E. Law,
A.N. Larsen, S. Odanaka, 1999,ISBN: 1-55899-475-0
Volume 569— In Situ Process Diagnostics and Modelling, O.
Auciello, A.R. Krauss, E.A. Irene,J.A. Schultz, 1999, ISBN:
1-55899-476-9
Volume 570— Epitaxial Growth, A-L. Barabasi, M. Krishnamurthy,
F. Liu, T.P. Pearsall, 1999,ISBN: 1-55899-477-7
Volume 571— Semiconductor Quantum Dots, S.C. Moss, D. Ila,
H.W.H. Lee, D.J. Norris, 2000,ISBN: 1-55899-478-5
Volume 572— Wide-Bandgap Semiconductors for High-Power,
High-Frequency andHigh-Temperature Applications—1999, S.C. Binari,
A.A. Burk, M.R. Melloch,C. Nguyen, 1999, ISBN: 1-55899-479-3
Volume 573— Compound Semiconductor Surface Passivation and Novel
Device Processing,H. Hasegawa, M. Hong, Z.H. Lu, S.J. Pearton,
1999, ISBN: 1-55899-480-7
Volume 574— Multicomponent Oxide Films for Electronics, M.E.
Hawley, D.H.A. Blank, C-B. Eom,D.G. Schlom, S.K. Streiffer, 1999,
ISBN: 1-55899-481-5
Volume 575— New Materials for Batteries and Fuel Cells, D.H.
Doughty, L.F. Nazar, M. Arakawa,H-P. Brack, K. Naoi, 2000, ISBN:
1-55899-482-3
Volume 576— Organic/Inorganic Hybrid Materials II, L.C. Klein,
L.F. Francis, M.R. DeGuire,J.E. Mark, 1999, ISBN: 1-55899-483-1
Volume 577— Advanced Hard and Soft Magnetic Materials, M. Coey,
L.H. Lewis, B-M. Ma,T. Schrefl, L. Schultz, J. Fidler, V.G. Harris,
R. Hasegawa, A. Inoue, M.E. McHenry,1999, ISBN: 1-55899-485-8
Volume 578— Multiscale Phenomena in Materials—Experiments and
Modeling, D.H. Lassila,I.M. Robertson, R. Phillips, B. Devincre,
2000, ISBN: 1-55899-486-6
Volume 579— The Optical Properties of Materials, J.R.
Chelikowsky, S.G. Louie, G. Martinez,E.L. Shirley, 2000, ISBN:
1-55899-487-4
Volume 580— Nucleation and Growth Processes in Materials, A.
Gonis, P.E.A. Turchi, A.J. Ardell,2000, ISBN: 1-55899-488-2
Volume 581— Nanophase and Nanocomposite Materials III, S.
Komarneni, J.C. Parker, H. Hahn,2000, ISBN: 1-55899-489-0
Volume 582— Molecular Electronics, S.T. Pantelides, M.A. Reed,
J. Murday, A. Aviram, 2000,ISBN: 1-55899-490-4
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MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Volume 583— Self-Organized Processes in Semiconductor Alloys, A.
Mascarenhas, B. Joyce,T. Suzuki, D. Follstaedt, 2000, ISBN:
1-55899-491-2
Volume 584— Materials Issues and Modeling for Device
Nanofabrication, L. Merhari, L.T. Wille,K. Qonsalves, M.F. Qyure,
S. Matsui, L.J. Whitman, 2000, ISBM: 1-55899-492-0
Volume 585— Fundamental Mechanisms of Low-Energy-Beam-Modified
Surface Growth andProcessing, S. Moss, E.H. Chason, B.H. Cooper, T.
Diaz de la Rubia, J.M.E. Harper,R. Murti, 2000, ISBM:
1-55899-493-9
Volume 586— Interfacial Engineering for Optimized Properties II,
C.B. Carter, E.L. Hall,C.L. Briant, S. Nutt, 2000, ISBM:
1-55899-494-7
Volume 587— Substrate Engineering—Paving the Way to Epitaxy,
D.P. Morton, D.Q. Schlom,M. Newman, D.H. Matthiesen, 2000, ISBM:
1-55899-495-5
Volume 588— Optical Microstructural Characterization of
Semiconductors, J. Piqueras,T. Sekiguchi, M.S. Unlu, M.M.
Kalkhoran, 2000, ISBM: 1-55899-496-3
Volume 589— Advances in Materials Problem Solving with the
Electron Microscope, J. Bentley,U. Dahmen, C. Allen, I. Petrov,
2000, ISBN: 1-55899-497-1
Volume 590— Applications of Synchrotron Radiation Techniques to
Materials Science V,S.R. Stock, D.L. Perry, S.M. Mini, 2000, ISBN:
1-55899-498-X
Volume 591— Mondestructive Methods for Materials
Characterization, T. Matikas, N. Meyendorf,Q. Baaklini, R. Gilmore,
2000, ISBN: 1-55899-499-8
Volume 592— Structure and Electronic Properties of Ultrathin
Dielectric Films on Silicon andRelated Structures, H.J. von
Bardeleben, D.A. Buchanan, A.H. Edwards, T. Hattori,2000, ISBM:
1-55899-500-5
Volume 593— Amorphous and Nanostructured Carbon, J. Robertson,
J.P. Sullivan, O. Zhou,T.B. Allen, B.F. Coll, 2000, ISBN:
1-55899-501-3
Volume 594— Thin Films—Stresses and Mechanical Properties VIII,
R. Vinci, O. Kraft, N. Moody,P. Besser, E. Shaffer II, 2000, ISBN:
1-55899-502-1
Volume 595— GaN and Related Alloys—1999, R. Feenstra, T. Myers,
M.S. Shur, H. Amano, 2000,ISBN: 1-55899-503-X
Volume 596— Ferroelectric Thin Films VIII, R.W. Schwartz, S.R.
Summerfelt, P.C. Mclntyre,Y. Miyasaka, D. Wouters, 2000, ISBN:
1-55899-504-8
Volume 597— Thin Films for Optical Waveguide Devices and
Materials for Optical Limiting,K. Nashimoto, B.W. Wessels, J.
Shmulovich, A.K-Y. Jen, K. Lewis, R. Pachter,R. Sutherland, J.
Perry, 2000, ISBN: 1-55899-505-6
Volume 598— Electrical, Optical, and Magnetic Properties of
Organic Solid-StateMaterials V, S.P. Ermer, J.R. Reynolds, J.W.
Perry, A.K-Y. Jen, Z. Bao, 2000,ISBN: 1-55899-506-4
Volume 599— Mineralization in Natural and Synthetic
Biomaterials, P. Li, P. Calvert, R.J. Levy,T. Kokubo, C.R. Scheid,
2000, ISBN: 1-55899-507-2
Volume 600— Electroactive Polymers, Q.M. Zhang, T. Furukawa, Y.
Bar-Cohen, J. Scheinbeim,2000, ISBN: 1-55899-508-0
Volume 601— Superplasticity—Current Status and Future Potential,
P.B. Berbon, M.Z. Berbon,T. Sakuma, T.G. Langdon, 2000, ISBN:
1-55899-509-9
Volume 602— Magnetoresistive Oxides and Related Materials, M.
Rzchowski, M. Kawasaki,A.J. Millis, M. Rajeswari, S. von Molnar,
2000, ISBM: 1-55899-510-2
Volume 603— Materials Issues for Tunable RF and Microwave
Devices, Q. Jia, F.A. Miranda,D.E. Oates, X. Xi, 2000, ISBN:
1-55899-511-0
Volume 604— Materials for Smart Systems III, M. Wun-Fogle, K.
Uchino, Y. Ito, R. Gotthardt,2000, ISBN: 1-55899-512-9
Volume 605— Materials Science of Microelectromechanical Systems
(MEMS) Devices II,M.P. deBoer, A.H. Heuer, S.J. Jacobs, E. Peeters,
2000, ISBN: 1-55899-513-7
Volume 606— Chemical Processing of Dielectrics, Insulators and
Electronic Ceramics, A.C. Jones,J. Veteran, S. Kaushal, D. Mullin,
R. Cooper, 2000, ISBN: 1-55899-514-5
Volume 607— Infrared Applications of Semiconductors III, B.J.H.
Stadler, M.O. Manasreh,I. Ferguson, Y-H. Zhang, 2000, ISBM:
1-55899-515-3
Volume 608— Scientific Basis for Nuclear Waste Management XXIII,
R.W. Smith, D.W. Shoesmith,2000, ISBN: 1-55899-516-1
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Society Symposium Proceedings: Volume 604:Materials for Smart
Systems IIIEditors: Marilyn Wun-Fogle, Kenji Uchino, Yukio Ito and
Rolf GotthardtFrontmatterMore information
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