SIC MOSFET SOOT SENSOR IN A CO-FIRED LTCC PACKAGE. Maciej Sobocinski, David Bilby, David Kubinski, Jaco Visser, Mike Andersson, Jari Juuti, Anita Lloyd Spetz, Heli Jantunen Microelectronics Research Unit, Faculty of Information technology and electrical engineering, University of Oulu, Finland Div. of Appl. Sensor Science, IFM, Linköping University, SE-581 83 Linköping, Sweden Ford Motor Company, 2101 Village Rd. Dearborn, MI 48121, USA 1 [email protected]
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
SIC MOSFET SOOT SENSOR IN A CO-FIRED LTCC PACKAGE.
Maciej Sobocinski, David Bilby, David Kubinski, Jaco Visser, Mike Andersson, Jari Juuti, Anita Lloyd Spetz, Heli Jantunen
Microelectronics Research Unit, Faculty of Information technology and electrical engineering, University of Oulu, FinlandDiv. of Appl. Sensor Science, IFM, Linköping University, SE-581 83 Linköping, Sweden
Ford Motor Company, 2101 Village Rd. Dearborn, MI 48121, USA
• Floating gate SiC MOSFET sensors• Co-fired with LTCC• Hermetic encapsulation• No brazing/wire bonding/resin encapsulation• Suspended electrode to enhance deposition of
soot
8
MEASUREMENT SETUP
9
SOOT CAPTURING MECHANISM
10SENSOR RESPONSE WITH ELECTROPHORETIC SOOT CAPTURING
AND WITHOUT
11SENSOR RESPONSE WITH HIGHER ELECTROPHORETIC VOLTAGE
Soot accumulation distorts the response
12SENSOR RESPONSE WITH HIGHER ELECTROPHORETIC VOLTAGE
Soot accumulation distorts the response
13INFLUENCE OF SOOT ACCUMULATION ON SENSOR OUTPUT
Clean Stuck with soot
Need for sensor regeneration!
14
RESPONSE TO DIFFERENT CONCENTRATIONS
15
CONCLUSIONS
• Floating gate SiC transistor can be used to detect soot• External electric field across the collection channel
increases speed of soot capturing• The electrophoretic voltage has its optimum [160 V
across 500 um gap in this case]• Sensor accumulates soot which mutes the response –
need for regeneration• Fast responses, dependent on concertation available at
the right conditions• Combination of SiC and LTCC allows placing of the sensor