Nano Symposium Ibex Engineering October 31, 2007 ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com [email protected]
Jun 23, 2015
Nano SymposiumIbex EngineeringOctober 31, 2007
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Agenda
• About Ibex • Mechanical Considerations
in Nano Positioning applications
• Examples of Nano Positioning In Industry
The Science Of Precision Motion
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Introduction
• Precision Stage Manufacturer• Forte
– Micron and under– Cross roller stages
• We make Nano technology easy
The Science Of Precision Motion
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Ibex History
• Founded By Andre Perrin in 1999• Background – Metrology System• Formed the company to fill a gap
by providing non-standard precision motion control platforms
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What We Look For When Designing A High Precision Stage
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When Reviewing a Nano Application
• Basic Engineering– Project scope– Specification review– Engineering challenges
relative to the spec– Component sizing– Materials– Control
• Who, what, where, and how • Feedback compatibility
The Process
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The Decision Driver
• Accuracy and Repeatability– Length of Travel
• Straightness/Flatness • Roll, Pitch and Yaw
– Envelope– Load and load position– Multi-axis Compounding– Environment
• Materials• Finish
Basic Engineering
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Concept Review
Accuracy• The closeness of agreement between the
results of a measurement and the true value of the object being measured.
Repeatability• Under Identical conditions how well a
system can return to one commanded location– Unidirectional– Bi-Directional
Basic Engineering
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Encoder Resolution doesn’t define the Accuracy of a Complete System
1. Pitch2. Roll3. Yaw4. Flatness5. Straightness 6. Scale
The combined interacting effects of all contributing factors must be analyzed before total system precision can be determined.
Mechanical Concepts
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Basic Engineering
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Concept Review
• If Straightness/Flatness is critical to application– Then what will the stage be mounted to….
• This Very important!!!
Basic Engineering
1 mm shim
4 M wide, 1.5 M tall
All Granite
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Concept Review
• Envelope
Basic Engineering
Nothing is for freeELECTROMATE
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Determine position and state of the load
• Orientation of the Load– Bearings– Materials– Abbe Error
• Vibration - Work• Speed & loading
– Settling
Basic Engineering
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Specifications Drive Bearing Choice
• Bearing type– Crossed Roller
• Anti-Creep considerations– Profile Rails
• Precision/preload– Air bearing
• Size • Orientation• Cost
Basic Engineering
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Contact Area
• Bearing Stiffness review
Basic Engineering
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Crossed Roller Review
• Bearing– Anti-Creep Considerations– Materials
Basic Engineering
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Air Bearings Review
• Air Bearings– High pressure = less deformation– No friction = no heat– Precision parts– Control Flatness and Straightness
Basic Engineering
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Velocity Control Considerations
• Ball Screws• Lead Error• Ball entering and exiting the return tube
• Profile Rails• Ball entering and exiting the return tube• Seal Drag
• Best – Linear Servo (Piezo or Ironless)– Air Bearing or Crossed Rollers
Basic Engineering
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Environment other Error Causing Factors
• Thermal expansion errors • Feedback Position• Cosine errors• Abbé offsets
Basic Engineering
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Environment
Basic Engineering
Temperature
Thermal Expansion• Stainless Screw = 12ppm/deg C• Aluminum = 23 ppm/deg. C• 3 degree rise makes a 100mm screw grow 7
microns
• Areas of concern– Type of motor and associated duty– Temperature swing of the environment– Adjacent equipment ELECTROMATE
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Feedback
• Feedback type– Linear
• Digital vs Analog– Scale Type – Typically
20um grating
• Tape• Glass 1.8 µm/m/°C • Invar 0.6 µm/m/°C
– Rotary– Interferometer
Basic Engineering
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Feedback – Cosine Error
Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.
Basic Engineering
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Abbé errors result from a positioning measuring device (typically a linear encoder) being offset from the point of work (end-effector) due to mechanical errors
Basic Engineering
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Concept Review
Other Considerations• Structural Stiffness
– What are we mounting too– Vibration dampening– The building and traffic
• Wire Management• Controls
– Features based relative to the end goal– Mapping, Notch filtering, Adaptive tuning for
variable inertias, Sin-Cosine inputs….
Basic Engineering
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A World Of Choice
Custom and OEM Built Motion Platforms
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System Technologies and Configurations
• Positioning stages– X,Y,Z, Theta– Z-Wedges– Goniometer– Gantries– Various compound stages– Granite Stages– Assemblies
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System Technologies and Configurations
• Bearing Technologies– Air Bearings– Crossed Roller– Recirculating Ball
• Round and Profile– Cam Rollers
• Screw Technologies– Precision Ground – Precision Rolled / Standard Rolled– Lead/acme
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System Technologies and Configurations
• Controls– ACS-Tech80– Galil– Yaskawa– Trio– PLC….
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System Technologies and Configurations
–Motor Technologies– Nano Motion– Rotary
• Stepper • Servo
– Linear Servo• Nippon Pulse• Yaskawa• Technotion
– Integrated Lead/acme motorsELECTROMATE
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The Markets We Serve
• Biomedical/Pharmaceutical• Life Sciences
– Cell Imaging…..• Medical Device • Semi Conductor Fab• Data Storage• National Lab/Research• Metrology• Photonics/Telecom• Aerospace and Defense….
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National Labs / Research
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Kinematics Systems
5 and 6 Degrees of freedomMultiple sizes and configurations.
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High and Ultra High VacuumIbex has the Vacuum solutions with years of experience building stages in a range atmospheres from 10-3 to 10-10. We’ve built an array of precision stage configurations using multiple combinations of bearing and motors.
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Gantry and Granite
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The Sciences
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Multi Axis Nano Stages
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Metrology
Metrology Platforms
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Metrology
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Exotic Platforms
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Life Sciences - OEM Builds
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Semiconductor
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Semiconductor
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Medical OEM’s
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Rotary – Nano and Direct Drive Servo
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Custom Applications
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All mechanical designs are created in 3D
IBEX is a Fully Integrated Company –
From 3D Design
Design To MFG
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Fully Integrated Manufacturing From SolidWorks
To Master Cam CAD/CAM
From 3D Design – To Mastercam
Design To MFG
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Fully Integrated CNC Mills
Mastercam to Machine Centers
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From Assembly to QA
In House Measuring Systems• Laser Interferometer – 1nm res• Auto Collimator• Laser Rotary Calibrator
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Thank You!
• For allowing our organization to present today
• We look forward to the partnership
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